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1. 发明专利

JP2006122988A Laser beam machine 审中-公开
标题翻译：激光束机
公开(公告)号：JP2006122988A
公开(公告)日：2006-05-18
申请号：JP2004316951
申请日：2004-10-29
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： NARUSE MASASHI , IJIMA KENICHI , KUROSAWA MITSUKI
IPC分类号： B23K26/38 , B23K26/067 , B23K26/08 , B23K101/42 , H01S3/10
摘要： PROBLEM TO BE SOLVED: To obtain a laser beam machine which, even if each of the spectroscoped two laser beams is linearly polarized light, can form a machined hole of complete roundness on such a workpiece that a machined hole thereon tends to be elliptical with linear polarization. SOLUTION: In the laser beam machine 100 that drills a hole at a prescribed position of a workpiece 13 by scanning a laser beam 2 emitted from a laser oscillator 1 with a galvano scanner 12 and by irradiating the workpiece 13 with the laser beam 2, there are provided a linearly polarization optical system 16 in which the laser beams emitted from the laser oscillator and made incident on the mirror 12a of the galvano scanner are transformed into linear polarized laser beams 7a, 8a having a polarizing azimuth angle of roughly 45° to the incident face of the mirror, and a galvano scanner 12 in which the one mirror 12a has a function of a 1/4 wavelength retardation plate and in which the incident linear polarized laser beams are transformed into circularly polarized laser beams 7b, 8b and emitted to the workpiece. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了获得激光束机，其即使每个分光的两束激光都是线性偏振光，也可以在这样的工件上形成完整圆度的机加工孔，使其上的加工孔倾向于椭圆形与线偏振。解决方案：在激光束机100中，通过用激光扫描器12扫描从激光振荡器1发射的激光束2，并用激光束照射工件13，在工件13的规定位置上钻孔如图2所示，提供了一种线性偏振光学系统16，其中从激光振荡器发射并入射到电动扫描仪的反射镜12a上的激光束被转换成具有大约45°的偏振方位角的线性偏振激光束7a，8a 相对于反射镜的入射面，以及电光扫描器12，其中一个反射镜12a具有1/4波长相位差板的功能，并且其中入射的线偏振激光束被转换成圆偏振激光束7b，8b 并发射到工件。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JP2008290137A Laser beam machining apparatus 有权
标题翻译：激光加工设备
公开(公告)号：JP2008290137A
公开(公告)日：2008-12-04
申请号：JP2007140210
申请日：2007-05-28
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： IWASHITA YOSHITAKA , IJIMA KENICHI , NARUSE MASASHI , KANEDA MITSUHIRO , KOBAYASHI NOBUTAKA , IWATA TAKAAKI
IPC分类号： B23K26/067 , B23K26/08 , B23K101/42 , H05K3/00
摘要： PROBLEM TO BE SOLVED: To provide a simultaneous multipoint irradiation type laser beam machining apparatus where the difference in working quality by two laser lights is reduced, and the working quality can be improved. SOLUTION: The laser beam machining apparatus is provided with: a first polarization means 21 splitting one laser light L into two laser lights Lα, Lβ with different light paths; a galvanoscanner 23a arranged on the light path of the laser light Lα and scanning the laser light Lα to the first direction on an XY table 11; a galvanoscanner 23b arranged on the light path of the laser light Lβand scanning the laser light Lβ to the second direction different from the first direction on the XY table 11; a second deflection means 25 mixing the two laser lights Lα, Lβ; a pair of main galvanoscanners 26 scanning the laser lights Lα, Lβ to the different third and fourth directions on the XY table 11; an fθlens 28 condensing the laser lights Lα, Lβ from the main galvanoscanner 26 on prescribed positions on a workpiece 12. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种同时多点照射型激光束加工装置，其中通过两个激光的工作质量差异降低，并且可以提高工作质量。解决方案：激光束加工装置设置有：将一个激光L分成具有不同光路的两个激光Lα，Lβ的第一偏振装置21; 布置在激光Lα的光路上并在XY台11上沿第一方向扫描激光Lα的电流扫描器23a; 布置在激光Lβ的光路上并将激光Lβ扫描到与XY台11上的第一方向不同的第二方向的电流扫描器23b; 将两个激光Lα，Lβ混合的第二偏转装置25; 一对主扫描仪26扫描XY台11上的激光Lα，Lβ到不同的第三和第四方向; 一个fθlens28将来自主电扫描器26的激光Lα，Lβ在工件12上的规定位置上冷凝。版权所有（C）2009，JPO＆INPIT

3. 发明专利

DE10296639T5 未知
公开(公告)号：DE10296639T5
公开(公告)日：2004-04-29
申请号：DE10296639
申请日：2002-03-28
申请人： MITSUBISHI ELECTRIC CORP
发明人： IJIMA KENICHI , KUROIWA TADASHI
IPC分类号： B23K26/064 , B23K26/067
摘要： In a laser machining apparatus in which one laser beam is split into two laser beams by first polarizing means, one of the laser beams propagates by way of a mirror, another laser beam is scanned in two axial directions by a first galvanoscanner, and the two laser beams are guided to second polarizing means and then scanned by a second galvanoscanner to process a workpiece, an optical path is configured so that the laser beam which is transmitted through the first polarizing means is reflected by the second polarizing means, and the laser beam which is reflected by the first polarizing means is transmitted through the second polarizing means.

4. 发明专利

DE112004000048T5 未知
公开(公告)号：DE112004000048T5
公开(公告)日：2005-08-18
申请号：DE112004000048
申请日：2004-05-19
申请人： MITSUBISHI ELECTRIC CORP
发明人： KUROIWA TADASHI , IJIMA KENICHI , KOBAYASHI NOBUTAKA
IPC分类号： B23K26/046 , B23K26/064 , B23K26/067 , B23K26/082 , H05K3/00
摘要： In a laser machining apparatus for machining a workpiece ( 13 ), a laser ( 2 ) emitted from an oscillator ( 1 ) is dispersed into a first laser beam ( 7 ) that is passed through a first polarizing means ( 6 ) and is reflected, via a mirror ( 5 ), by a second polarizing means ( 9 ), and a second laser beam ( 8 ) that is reflected by the first polarizing means ( 6 ), is scanned bi-axially by a first galvano-scanner ( 11 ), and is passed through the second polarizing means ( 9 ); scanning by a second galvano-scanner ( 12 ) is carried out, and a third polarizing means ( 15 ) for polarizing angle adjustment, capable of angle adjustment, is disposed before the first polarizing means ( 6 ).

5. 发明专利

DE10297451B4 未知
公开(公告)号：DE10297451B4
公开(公告)日：2009-12-24
申请号：DE10297451
申请日：2002-11-13
申请人： MITSUBISHI ELECTRIC CORP
发明人： KUROIWA TADASHI , IJIMA KENICHI , KOBAYASHI NOBUTAKA
IPC分类号： B23K26/067 , B23K26/064 , B23K26/382 , H05K3/00
摘要： A laser material processing apparatus for processing a workpiece ( 22 ) in such a way as to separate one laser light ( 26 ) into two laser beams ( 26 a , 26 b) via first polarizer ( 25 ), one laser beam being passed via the mirrors ( 24 ), the other laser beam being scanned biaxially by a first galvano scanner ( 29 ), and conduct two laser beams ( 26 a , 26 b) to a second polarizer ( 27 ) for scanning via a second galvano scanner ( 30 ), wherein an optical path is constituted such that the laser beam ( 26 b) transmitted through the first polarizer ( 25 ) is reflected by the second polarizer ( 27 ), and the laser beam ( 26 a) reflected by the first polarizer ( 25 ) is transmitted through the second polarizer ( 27 ).

6. 发明专利

DE112004000048B4 未知
公开(公告)号：DE112004000048B4
公开(公告)日：2007-11-08
申请号：DE112004000048
申请日：2004-05-19
申请人： MITSUBISHI ELECTRIC CORP
发明人： KUROIWA TADASHI , IJIMA KENICHI , KOBAYASHI NOBUTAKA
IPC分类号： B23K26/067 , B23K26/046 , B23K26/064 , B23K26/082 , H05K3/00
摘要： In a laser machining apparatus for machining a workpiece ( 13 ), a laser ( 2 ) emitted from an oscillator ( 1 ) is dispersed into a first laser beam ( 7 ) that is passed through a first polarizing means ( 6 ) and is reflected, via a mirror ( 5 ), by a second polarizing means ( 9 ), and a second laser beam ( 8 ) that is reflected by the first polarizing means ( 6 ), is scanned bi-axially by a first galvano-scanner ( 11 ), and is passed through the second polarizing means ( 9 ); scanning by a second galvano-scanner ( 12 ) is carried out, and a third polarizing means ( 15 ) for polarizing angle adjustment, capable of angle adjustment, is disposed before the first polarizing means ( 6 ).

7. 发明专利

DE10296639B4 未知
公开(公告)号：DE10296639B4
公开(公告)日：2007-06-21
申请号：DE10296639
申请日：2002-03-28
申请人： MITSUBISHI ELECTRIC CORP
发明人： IJIMA KENICHI , KUROIWA TADASHI
IPC分类号： B23K26/064 , B23K26/067 , H05K3/00
摘要： In a laser machining apparatus in which one laser beam is split into two laser beams by first polarizing means, one of the laser beams propagates by way of a mirror, another laser beam is scanned in two axial directions by a first galvanoscanner, and the two laser beams are guided to second polarizing means and then scanned by a second galvanoscanner to process a workpiece, an optical path is configured so that the laser beam which is transmitted through the first polarizing means is reflected by the second polarizing means, and the laser beam which is reflected by the first polarizing means is transmitted through the second polarizing means.

8. 发明专利

DE10297451T5 未知
公开(公告)号：DE10297451T5
公开(公告)日：2004-12-23
申请号：DE10297451
申请日：2002-11-13
申请人： MITSUBISHI ELECTRIC CORP
发明人： KUROIWA TADASHI , IJIMA KENICHI , KOBAYASHI NOBUTAKA
IPC分类号： B23K26/064 , B23K26/067 , B23K26/382 , H05K3/00
摘要： A laser material processing apparatus for processing a workpiece ( 22 ) in such a way as to separate one laser light ( 26 ) into two laser beams ( 26 a , 26 b) via first polarizer ( 25 ), one laser beam being passed via the mirrors ( 24 ), the other laser beam being scanned biaxially by a first galvano scanner ( 29 ), and conduct two laser beams ( 26 a , 26 b) to a second polarizer ( 27 ) for scanning via a second galvano scanner ( 30 ), wherein an optical path is constituted such that the laser beam ( 26 b) transmitted through the first polarizer ( 25 ) is reflected by the second polarizer ( 27 ), and the laser beam ( 26 a) reflected by the first polarizer ( 25 ) is transmitted through the second polarizer ( 27 ).

9. 发明专利

JP2009125761A LASER BEAM MACHINING APPARATUS 审中-公开
公开(公告)号：JP2009125761A
公开(公告)日：2009-06-11
申请号：JP2007301632
申请日：2007-11-21
申请人： MITSUBISHI ELECTRIC CORP
发明人： NARUSE MASASHI , IWASHITA YOSHITAKA , TAKIGAWA YASUHIRO , IJIMA KENICHI , KOBAYASHI NOBUTAKA
IPC分类号： B23K26/046 , B23K26/067 , B23K26/082 , G02B5/10
摘要： PROBLEM TO BE SOLVED: To obtain a laser beam machining apparatus that can equalize the size of an irradiation region on a workpiece of each laser beam separated into spectral components, in a laser beam machining apparatus that performs machining by separating one laser beam into a plurality of spectral components and simultaneously emitting them onto a workpiece. SOLUTION: The laser beam machining apparatus includes a focal difference compensation mirror 25a that is arranged on an optical path of a laser beam L α among a plurality of laser beams separated into spectral components and that varies a beam diameter on a workpiece 12 of the laser beam L α , and a focal difference compensation mirror controlling function 52 that varies a curvature in the meridional direction and in the sagittal direction of the reflection surface of the focal difference compensation mirror 25a so as not to change the image forming position in the meridional direction and the image forming position in the sagittal direction of the mirror 25a. COPYRIGHT: (C)2009,JPO&INPIT

10. 发明专利

JPH09164493A LASER BEAM MACHINE 失效
公开(公告)号：JPH09164493A
公开(公告)日：1997-06-24
申请号：JP32884195
申请日：1995-12-18
申请人： MITSUBISHI ELECTRIC CORP
发明人： OSANAI HAJIME , IJIMA KENICHI , KUROSAWA MITSUKI
IPC分类号： B23K26/064 , B23K26/067 , B23K26/06
摘要： PROBLEM TO BE SOLVED: To execute machining at the same time with a full peak power by detecting a window part and a mirror part of a 1st and a 2nd rotary chopper mirrors and controlling a laser beam oscillator, a laser light optical path distributor and a driving part based on these outputting wave shapes. SOLUTION: In a laser beam 9 outputted from a laser beam oscillator 1, due to the function of a beam splitter 50, 50% is transmitted and the remainder 50% is reflected, so a pulse peak power is made as 1/2, however, the transmitted laser beam 9 is passed or reflected with a 2nd rotary chopper mirror 2c having a window part and a mirror part, it is supplied to a 1st machining station 20 and a 2nd machining station 17, the reflected laser beam is reflected or passed with a 2nd rotary chopper mirror 2e, it is supplied to a 3rd machining station 24 and a 4th machining station 28, so at all the station, the same time machining can be executed with 1/2 of the pulse peak value of the laser beam.

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