会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 7. 发明授权
    • Method and apparatus for evaporating a liquid organic metal
    • 蒸发液体有机金属的方法和装置
    • US4591464A
    • 1986-05-27
    • US671987
    • 1984-11-15
    • Nobuaki KanenoKazuhisa Takahashi
    • Nobuaki KanenoKazuhisa Takahashi
    • B01D1/14B01J7/02C23C16/448H01L21/205B01F3/04
    • B01D1/14C23C16/4482
    • A bubbling evaporator comprises: a vessel (11); a partition plate (11a) for dividing the vessel (11) into an upper chamber (11b) for temporarily storing carrier gas and a lower chamber (11c) for containing liquid (2); an inlet pipe (12 or 14) for making the carrier gas blow from the upper chamber (11b) into the liquid (2) in the lower chamber (11c) through the partition plate (11a) to bubble and evaporate the liquid (2); and an outlet pipe (13) for leading the evaporated vapor together with the carrier gas to the exterior of the vessel (11). Thus, backflow of the liquid (2) to the exterior of the vessel (11) can be prevented and stable pressure of the evaporated vapor can be obtained. A method of evaporating a liquid organic metal to be used in a vapor deposition process for manufacturing semiconductor devices and the like is also disclosed.
    • 鼓泡蒸发器包括:容器(11); 用于将容器(11)分成用于临时储存载气的上室(11b)和用于容纳液体(2)的下室(11c))的隔板(11a) 用于使载气从上室(11b)通过分隔板(11a)吹入下室(11c)中的液体(2)中的入口管(12或14)气泡并蒸发液体(2) ; 以及用于将蒸发的蒸气与载气一起引导到容器(11)的外部的出口管(13)。 因此,可以防止液体(2)回流到容器(11)的外部,并且可以获得稳定的蒸发蒸汽的压力。 还公开了一种蒸发用于制造半导体器件等的气相沉积工艺中的液体有机金属的方法。