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1. 发明授权

US4701620A Electron beam exposure apparatus 失效
标题翻译：电子束曝光装置
公开(公告)号：US4701620A
公开(公告)日：1987-10-20
申请号：US893180
申请日：1986-08-05
申请人： Masahide Okumura , Takashi Matsuzaka , Genya Matsuoka , Norio Saitou
发明人： Masahide Okumura , Takashi Matsuzaka , Genya Matsuoka , Norio Saitou
IPC分类号： H01L21/30 , H01J37/141 , H01J37/153 , H01J37/21 , H01J37/304 , H01L21/027 , G21K1/093 , H01J37/07
CPC分类号： H01J37/153 , H01J37/304
摘要： Disclosed is an electron beam exposure apparatus which includes an objective lens focusing an electron beam, and a dynamic focus correction lens dynamically correcting the focusing by the objective lens. The apparatus comprises a control circuit which, in order to prevent a current variation induced in the objective lens by the dynamic focus correction lens, controls current supplied to the objective lens so as to cancel the current variation induced in the objective lens due to the coil current of the dynamic focus correction lens.
摘要翻译：公开了一种电子束曝光装置，其包括聚焦电子束的物镜和动态校正透镜，动态校正物镜的聚焦。该装置包括一个控制电路，为了防止物镜由动态聚焦校正透镜引起的电流变化，控制提供给物镜的电流，以消除由于线圈而引起的物镜中的电流变化电流的动态聚焦校正镜头。

2. 发明授权

US4808829A Mark position detection system for use in charged particle beam apparatus 失效
标题翻译：用于带电粒子束装置的标记位置检测系统
公开(公告)号：US4808829A
公开(公告)日：1989-02-28
申请号：US63018
申请日：1987-06-17
申请人： Masahide Okumura , Takashi Matsuzaka , Genya Matsuoka , Kazumi Iwadate , Tadahito Matsuda , Ryoichi Yamaguchi
发明人： Masahide Okumura , Takashi Matsuzaka , Genya Matsuoka , Kazumi Iwadate , Tadahito Matsuda , Ryoichi Yamaguchi
IPC分类号： G03F9/00 , G01Q30/02 , G01Q30/04 , H01J37/304 , H01L21/027 , H01L21/30 , G01N23/22
CPC分类号： H01J37/3045
摘要： A mark position detection system used in a charged particle beam apparatus and including detection circuit for detecting a reflected electron generated at a mark when the mark is scanned with a charged particle beam, to obtain a mark signal, and signal processing circuit for comparing the mark signal from the detection circuit with a predetermined threshold level to find the position of the charged particle beam at a time the mark signal traverses the threshold level, thereby detecting the position of a mark edge, is disclosed in which, when the mark signal traverses the threshold level and has a peak value exceeding a predetermined value, it is determined by the signal processing circuit that the position of the charged particle beam at a time point at which the mark signal traverses the threshold level is the position of the mark.
摘要翻译：一种用于带电粒子束装置的标记位置检测系统，包括：检测电路，用于检测用带电粒子束扫描标记时在标记处产生的反射电子，以获得标记信号;以及信号处理电路，用于比较标记来自检测电路的信号具有预定的阈值电平，以在标记信号穿过阈值电平的时候找到带电粒子束的位置，从而检测标记边缘的位置，其中当标记信号穿过阈值电平并且具有超过预定值的峰值，则由信号处理电路确定在标记信号穿过阈值电平的时间点处的带电粒子束的位置是标记的位置。

3. 发明授权

US4577111A Apparatus for electron beam lithography 失效
标题翻译：电子束光刻设备
公开(公告)号：US4577111A
公开(公告)日：1986-03-18
申请号：US516091
申请日：1983-07-22
申请人： Norio Saitou , Susumu Ozasa , Takashi Matsuzaka
发明人： Norio Saitou , Susumu Ozasa , Takashi Matsuzaka
IPC分类号： G03F7/20 , H01J37/30 , H01J37/317 , H01L21/027 , H01L21/30 , H01J37/26
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/3007 , H01J37/3174 , H01L21/30 , H01J2237/1505 , H01J2237/152 , H01J2237/30472 , H01J2237/31776
摘要： An apparatus for electron beam lithography comprises at least one mask equipped with a polygonal aperture to be subjected to an electron beam from an electron beam generator, an electron lens system for demagnifying and imaging the polygonal aperture of the mask, and a solenoid coil for electron beam rotation adjustment placed between the mask and the final-stage electron lens.
摘要翻译：用于电子束光刻的装置包括至少一个掩模，其配备有要经受来自电子束发生器的电子束的多边形孔，用于对掩模的多边形孔径进行缩小和成像的电子透镜系统和用于电子的螺线管线圈光束旋转调节放置在掩模和终末电子透镜之间。

4. 发明授权

US06511048B1 Electron beam lithography apparatus and pattern forming method 失效
标题翻译：电子束光刻设备和图案形成方法
公开(公告)号：US06511048B1
公开(公告)日：2003-01-28
申请号：US09191383
申请日：1998-11-13
申请人： Yasunari Sohda , Yasuhiro Someda , Hiroya Ohta , Takashi Matsuzaka , Norio Saitou , Yoshinori Nakayama
发明人： Yasunari Sohda , Yasuhiro Someda , Hiroya Ohta , Takashi Matsuzaka , Norio Saitou , Yoshinori Nakayama
IPC分类号： H01J3730
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/3174 , H01J2237/31776
摘要： An electron beam lithography apparatus and a semiconductor device pattern forming method for precisely writing patterns near the periphery of a cell mask so that large scale integrated circuits and fine structure devices are fabricated at high yield rates. Cell figures with lower aperture rates are located peripherally and cell figures with higher aperture rates are located closer to a central portion within each of aperture groups furnished on a second mask of the inventive apparatus adopting cell projection. Illustratively, on a mask for use in semiconductor device fabrication, cell figures for forming line patterns and gate patterns are located centrally and cell figures for forming hole patterns are positioned peripherally in each aperture group. This allows the peripherally located figures to be written precisely in each aperture group.
摘要翻译：一种电子束光刻设备和用于在单元掩模的周围精确地写入图案的半导体器件图案形成方法，从而以高产率制造大规模集成电路和精细结构器件。具有较低孔径率的单元图形位于外围，并且具有较高孔径率的单元图形位于更接近于采用单元投影的本发明设备的第二掩模上提供的每个孔组内的中心部分。示例性地，在用于半导体器件制造的掩模上，用于形成线图案和栅极图案的单元图形位于中央，并且用于形成孔图案的单元图形周边地定位在每个孔组中。这允许在每个孔径组中精确地写入外围定位的图形。

5. 发明授权

US4382182A Method of displaying an image of phase contrast in a scanning transmission electron microscope 失效
标题翻译：在扫描透射电子显微镜中显示相位差图像的方法
公开(公告)号：US4382182A
公开(公告)日：1983-05-03
申请号：US266290
申请日：1981-05-22
申请人： Takashi Matsuzaka , Hideo Todokoro
发明人： Takashi Matsuzaka , Hideo Todokoro
IPC分类号： H01J37/22 , H01J37/244 , H01J37/26 , H01J37/28
CPC分类号： H01J37/28
摘要： A method of and apparatus for displaying an image of phase contrast in a scanning transmission electron microscope, in which an electron beam flux transmitted through a specimen is deflected with a high frequency and repeatedly moved on an aperture provided in a region where a transmitted electron beam and a scattered electron beam interfere, and among signal components detected by a detector through the aperture, only a signal synchronous with the high frequency is sampled and detection-rectified, whereby the difference of the intensities of the region where both the electron beams interfere is detected so as to display the image of phase contrast of the specimen.
摘要翻译：一种用于在扫描透射电子显微镜中显示相位对比度的图像的方法和装置，其中透射通过样本的电子束通量以高频率偏转并在设置在透射电子束的区域中的孔上重复移动并且散射电子束干扰，并且在通过孔径由检测器检测的信号分量中，仅对与高频同步的信号进行采样和检测整流，由此两个电子束干涉的区域的强度差为以便显示样本的相位对比度的图像。

6. 发明授权

US5326979A Electron beam lithography system 失效
标题翻译：电子束光刻系统
公开(公告)号：US5326979A
公开(公告)日：1994-07-05
申请号：US950689
申请日：1992-09-25
申请人： Katsuhiro Kawasaki , Takashi Matsuzaka , Hiroya Ohta , Toshihiko Kohno
发明人： Katsuhiro Kawasaki , Takashi Matsuzaka , Hiroya Ohta , Toshihiko Kohno
IPC分类号： H01L21/027 , H01J37/302 , H01L21/30 , H01J37/256
CPC分类号： H01J37/3026
摘要： An electron beam lithography system which generates phase shift pattern data relating to main patterns, and exposes the phase shift pattern on a mask plate by using an electron beam in accordance with instruction from a computer. An electron beam lithography system is provided which can remarkably decrease a time needed for preparing phase shift pattern data. The apparatus is furnished with a parameter table for storing equations to generate phase shift pattern data, and generates the phase shift pattern data by assigning original pattern data into equations in accordance with a corresponding instruction for applying a phase shift method, and automatically exposes the phase shift pattern.
摘要翻译：一种电子束光刻系统，其产生与主图案相关的相移图案数据，并且根据来自计算机的指令通过使用电子束在掩模板上曝光相移图案。提供了一种电子束光刻系统，其可以显着地减少准备相移图案数据所需的时间。该装置具有用于存储方程式以产生相移模式数据的参数表，并且通过根据用于施加相移方法的相应指令将原始模式数据分配到等式中并生成相移模式数据，并且自动地将相位移位模式

7. 发明授权

US4897628A Gas sensor and method of manufacturing the same 失效
标题翻译：气体传感器及其制造方法
公开(公告)号：US4897628A
公开(公告)日：1990-01-30
申请号：US116986
申请日：1987-11-05
申请人： Masamichi Ippommatsu , Takeshi Matsumoto , Shingo Yakushizi , Katsuyuki Kuroki , Takashi Matsuzaka
发明人： Masamichi Ippommatsu , Takeshi Matsumoto , Shingo Yakushizi , Katsuyuki Kuroki , Takashi Matsuzaka
IPC分类号： G01N27/12
CPC分类号： G01N27/12
摘要： A gas sensor using an n-type metal oxide semiconductor and a method for manufacturing such a gas sensor is provided. More particularly, a gas sensor for detecting an inflammable gas and a method for manufacturing the same.
摘要翻译：提供了使用n型金属氧化物半导体的气体传感器和制造这种气体传感器的方法。更具体地，涉及一种用于检测易燃气体的气体传感器及其制造方法。

8. 发明授权

US4687435A Pulse combustor 失效
标题翻译：脉冲燃烧器
公开(公告)号：US4687435A
公开(公告)日：1987-08-18
申请号：US717882
申请日：1985-03-29
申请人： Takashi Matsuzaka , Toshihiko Saito , Satoshi Hisaoka
发明人： Takashi Matsuzaka , Toshihiko Saito , Satoshi Hisaoka
IPC分类号： F23C15/00 , F23C11/04
CPC分类号： F23C15/00 , Y10T137/7861
摘要： A pulse combustor has a casing in which a combustion chamber is defined. Air is supplied to the combustion chamber through an air supply pipe. A valve mechanism for controlling the air supply to the chamber is provided in the air supply pipe. The valve mechanism has a base plate with a plurality of air supply holes for the passage of air, and a flapper valve for opening and closing the air supply holes in accordance with the change of pressure inside the chamber. The flapper valve is composed of a plurality of ring-shaped segments with different diameters. These segments are arranged concentrically with one another.
摘要翻译：脉冲燃烧器具有限定燃烧室的壳体。空气通过供气管道供应到燃烧室。用于控制向腔室供气的阀机构设置在供气管中。阀机构具有基板，其具有用于空气通过的多个供气孔，以及根据室内的压力变化来打开和关闭空气供给孔的挡板阀。挡板阀由具有不同直径的多个环形段组成。这些片段彼此同心地排列。

9. 发明授权

US4896514A Air-conditioning apparatus 失效
标题翻译：空调机
公开(公告)号：US4896514A
公开(公告)日：1990-01-30
申请号：US264875
申请日：1988-10-31
申请人： Akihiko Sugiyama , Takashi Matsuzaka
发明人： Akihiko Sugiyama , Takashi Matsuzaka
IPC分类号： B01D53/047 , F24F1/00 , F24F3/16
CPC分类号： B01D53/047 , F24F1/0003 , F24F3/16 , B01D2253/108 , B01D2256/12 , B01D2257/102 , B01D2259/40003 , B01D2259/402 , F24F2003/1692
摘要： An air-conditioning apparatus includes an air-conditioner and an oxygen ratio increasing device. The air-conditioner has an indoor unit having an indoor heat exchanger and arranged in a room to be air-conditioned, and an outdoor unit having an outdoor heat exchanger and arranged outdoors. These units are connected to each other through a coolant pipe. The increasing device has an oxygen ratio increasing mechanism for producing oxygen-ratio increased air having a high oxygen concentration, and an air supply pipe for supplying the produced oxygen-ratio increased air into the room. The mechanism is arranged in the outdoor unit, and includes an adsorbing material for adsorbing nitrogen in air to produce the oxygen-ratio increased air and an air compressor for supplying air to the air supply pipe through the adsorbing material.
摘要翻译：空调装置包括空调和氧比增加装置。空调机具有室内单元，其具有室内热交换器，并配置在要进行空调的房间中，室外单元具有室外热交换器并配置在室外。这些单元通过冷却剂管彼此连接。增加装置具有用于产生具有高氧浓度的氧比增加空气的氧比率增加机构，以及用于将产生的氧比率增加的空气供应到房间中的供气管。该机构设置在室外机中，具有吸附空气中的氮吸附以产生增氧空气的吸附材料和通过吸附材料向空气供给管供给空气的空气压缩机。

10. 发明授权

US4642046A Pulse combustor 失效
标题翻译：脉冲燃烧器
公开(公告)号：US4642046A
公开(公告)日：1987-02-10
申请号：US643384
申请日：1984-08-23
申请人： Kazuo Saito , Takashi Matsuzaka , Mitsuyoshi Chiba , Shigeto Sumitani , Masami Yodo , Hiroyuki Araya
发明人： Kazuo Saito , Takashi Matsuzaka , Mitsuyoshi Chiba , Shigeto Sumitani , Masami Yodo , Hiroyuki Araya
IPC分类号： F02K7/02 , F23C15/00 , F23R7/00 , F23D14/62 , F23C11/04
CPC分类号： F23C15/00 , F02K7/02 , F23R7/00
摘要： A pulse combustor has a main body in which a cylindrical mixing chamber and a combustion chamber are formed. An air inlet port and a fuel inlet port are formed in the body to open into the mixing chamber. These inlet ports are located on the same circumference of the inner periphery of the mixing chamber and spaced from each other. An air supply pipe for introducing air into the mixing chamber is connected at one end to the air inlet port, and a fuel supply pipe for introducing fuel gas into the mixing chamber is connected at one end to the fuel inlet port. The air supply pipe extends in a predetermined direction so as to cause the air introduced into the mixing chamber to flow while rotating in one direction along the inner periphery of the mixing chamber. The fuel supply pipe extends in a predetermined direction to cause the fuel to be introduced into the mixing chamber along a direction opposite the direction in which the air rotates.
摘要翻译：脉冲燃烧器具有形成圆柱形混合室和燃烧室的主体。空气入口和燃料入口形成在主体中以进入混合室。这些入口位于混合室的内周边的相同圆周上并且彼此间隔开。用于将空气引入混合室的供气管的一端连接到进气口，并且用于将燃料气体引入混合室的燃料供给管的一端连接到燃料入口。空气供给管沿预定方向延伸，以便沿着混合室的内周沿一个方向旋转，引入到混合室中的空气流动。燃料供给管沿预定方向延伸，以使燃料沿与空气旋转方向相反的方向被引入混合室。

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