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1. 发明授权

US06798043B2 Structure and method for isolating porous low-k dielectric films 失效
标题翻译：隔离多孔低k电介质膜的结构和方法
公开(公告)号：US06798043B2
公开(公告)日：2004-09-28
申请号：US10038352
申请日：2002-01-02
申请人： Kurt G. Steiner , Susan Vitkavage , Steve Lytle , Gerald Gibson , Scott Jessen
发明人： Kurt G. Steiner , Susan Vitkavage , Steve Lytle , Gerald Gibson , Scott Jessen
IPC分类号： H01L2358
CPC分类号： H01L21/76832 , H01L21/02126 , H01L21/02203 , H01L21/02304 , H01L21/02362 , H01L21/312 , H01L21/3146 , H01L21/31633 , H01L21/31695 , H01L21/3185 , H01L21/76801 , H01L21/76808 , H01L21/76834 , H01L23/5329 , H01L23/53295 , H01L2924/0002 , H01L2924/00
摘要： A film structure includes low-k dielectric films and N—H base source films such as barrier layer films, etch-stop films and hardmask films. Interposed between the low-k dielectric film and adjacent N—H base film is a TEOS oxide film which suppresses the diffusion of amines or other N—H bases from the N—H base source film to the low-k dielectric film. The film structure may be patterned using DUV lithography and a chemically amplified photoresist since there are no base groups present in the low-k dielectric films to neutralize the acid catalysts in the chemically amplified photoresist.
摘要翻译：膜结构包括低k电介质膜和N-H基源膜，例如阻挡层膜，蚀刻停止膜和硬掩模膜。在低k电介质膜和相邻的N-H基膜之间插入TEOS氧化物膜，其抑制胺或其它N-H碱从N-H基底膜向低k电介质膜的扩散。可以使用DUV光刻和化学放大的光致抗蚀剂来对膜结构进行图案化，因为在低k电介质膜中不存在碱基以中和化学放大光致抗蚀剂中的酸催化剂。

2. 发明授权

US06507433B2 Method and apparatus for preventing application of excessive force between microscope objective and stage 失效
公开(公告)号：US06507433B2
公开(公告)日：2003-01-14
申请号：US09833542
申请日：2001-04-11
申请人： Jason Mecham , Steve Lytle
发明人： Jason Mecham , Steve Lytle
IPC分类号： G02B2100
CPC分类号： G02B21/24 , G02B21/248
摘要： A method and apparatus for preventing excessive closure between a retractable tip objective and the stage of a microscope which includes positioning a sensor in the turret of a microscope, which sensor is capable of detecting excessive retracting of the retractable tip into the body of the objective, and providing a controller for monitoring the sensor for such excessive retracting and issuing an alert in response to the detection of an event of such excessive retracting. The alert may be made by way of an audio output, or by a visual cue or both. Extinguishing the lamp of the microscope is a preferred visual cue, as the excessive retracting of the retractable tip is generally caused by a focusing error, and the extinguishing of the light source reduces or eliminates the ability of the user of the microscope to focus the microscope, thus attracting his or her attention.

3. 发明授权

US07566176B2 Fiber-optic endface cleaning apparatus and method 有权
标题翻译：光纤端面清洁装置及方法
公开(公告)号：US07566176B2
公开(公告)日：2009-07-28
申请号：US11764697
申请日：2007-06-18
申请人： Steve Lytle , Kevin G. Cassady , Gregory J. Gerhard
发明人： Steve Lytle , Kevin G. Cassady , Gregory J. Gerhard
IPC分类号： G02B6/36 , G02B6/38 , G02B6/00
CPC分类号： G02B6/3825 , B08B3/02 , B08B5/02 , B08B11/02 , B08B2240/02 , G02B6/25 , G02B6/3807 , G02B6/3866
摘要： A cleaning apparatus (1100) for cleaning an endface (1104) of an optical fiber (1106), wherein a portion of the optical fiber is contained within an interface device (1103) is provided. The cleaning apparatus includes a housing (1114) having an interface portion (1124) adapted to be received by the interface device. The cleaning apparatus further includes a fluid dispensing assembly (1116) at least partially disposed within the housing, wherein at least a portion (1112) of the fluid dispensing assembly engages the endface when the interface portion is received by the interface device. The fluid dispensing assembly is operable to deliver a fluid and a solvent upon the endface when the interface portion of the housing is received by the interface device to aid in the removal of contaminants on the endface. The cleaning apparatus may include a contact cleaning assembly (1304) and/or a microscope (1408).
摘要翻译：一种用于清洁光纤（1106）的端面（1104）的清洁设备（1100），其中光纤的一部分被包含在接口设备（1103）内。清洁装置包括具有适于由接口装置接收的接口部分（1124）的壳体（1114）。清洁装置还包括至少部分地设置在壳体内的流体分配组件（1116），其中当界面部分被界面装置接收时，流体分配组件的至少一部分（1112）接合端面。当壳体的接口部分被接口装置接收以帮助去除端面上的污染物时，流体分配组件可操作以将流体和溶剂输送到端面上。清洁设备可以包括接触清洁组件（1304）和/或显微镜（1408）。

4. 发明申请

US20080152284A1 FIBER-OPTIC ENDFACE CLEANING APPARATUS AND METHOD 有权
标题翻译：光纤端面清洁装置及方法
公开(公告)号：US20080152284A1
公开(公告)日：2008-06-26
申请号：US11764697
申请日：2007-06-18
申请人： Steve Lytle , Kevin G. Cassady , Gregory J. Gerhard
发明人： Steve Lytle , Kevin G. Cassady , Gregory J. Gerhard
IPC分类号： G02B6/36
CPC分类号： G02B6/3825 , B08B3/02 , B08B5/02 , B08B11/02 , B08B2240/02 , G02B6/25 , G02B6/3807 , G02B6/3866
摘要： A cleaning apparatus (1100) for cleaning an endface (1104) of an optical fiber (1106), wherein a portion of the optical fiber is contained within an interface device (1103) is provided. The cleaning apparatus includes a housing (1114) having an interface portion (1124) adapted to be received by the interface device. The cleaning apparatus further includes a fluid dispensing assembly (1116) at least partially disposed within the housing, wherein at least a portion (1112) of the fluid dispensing assembly engages the endface when the interface portion is received by the interface device. The fluid dispensing assembly is operable to deliver a fluid and a solvent upon the endface when the interface portion of the housing is received by the interface device to aid in the removal of contaminants on the endface. The cleaning apparatus may include a contact cleaning assembly (1304) and/or a microscope (1408).
摘要翻译：一种用于清洁光纤（1106）的端面（1104）的清洁设备（1100），其中光纤的一部分被包含在接口设备（1103）内。清洁装置包括具有适于由接口装置接收的接口部分（1124）的壳体（1114）。清洁装置还包括至少部分地设置在壳体内的流体分配组件（1116），其中当界面部分被界面装置接收时，流体分配组件的至少一部分（1112）接合端面。当壳体的接口部分被接口装置接收以帮助去除端面上的污染物时，流体分配组件可操作以将流体和溶剂输送到端面上。清洁设备可以包括接触清洁组件（1304）和/或显微镜（1408）。

5. 发明授权

US07232262B2 Fiber-optic endface cleaning apparatus and method 有权
标题翻译：光纤端面清洁装置及方法
公开(公告)号：US07232262B2
公开(公告)日：2007-06-19
申请号：US10428954
申请日：2003-05-01
申请人： Steve Lytle , Kevin G. Cassady , Gregory J. Gerhard
发明人： Steve Lytle , Kevin G. Cassady , Gregory J. Gerhard
IPC分类号： G02B6/36
CPC分类号： G02B6/3825 , B08B3/02 , B08B5/02 , B08B11/02 , B08B2240/02 , G02B6/25 , G02B6/3807 , G02B6/3866
摘要： A cleaning apparatus (1100) for cleaning an endface (1104) of an optical fiber (1106), wherein a portion of the optical fiber is contained within an interface device (1103) is provided. The cleaning apparatus includes a housing (1114) having an interface portion (1124) adapted to be received by the interface device. The cleaning apparatus further includes a fluid dispensing assembly (1116) at least partially disposed within the housing, wherein at least a portion (1112) of the fluid dispensing assembly engages the endface when the interface portion is received by the interface device. The fluid dispensing assembly is operable to deliver a fluid and a solvent upon the endface when the interface portion of the housing is received by the interface device to aid in the removal of contaminants on the endface. The cleaning apparatus may include a contact cleaning assembly (1304) and/or a microscope (1408).
摘要翻译：一种用于清洁光纤（1106）的端面（1104）的清洁设备（1100），其中光纤的一部分被包含在接口设备（1103）内。清洁装置包括具有适于由接口装置接收的接口部分（1124）的壳体（1114）。清洁装置还包括至少部分地设置在壳体内的流体分配组件（1116），其中当界面部分被界面装置接收时，流体分配组件的至少一部分（1112）接合端面。当壳体的接口部分被接口装置接收以帮助去除端面上的污染物时，流体分配组件可操作以将流体和溶剂输送到端面上。清洁设备可以包括接触清洁组件（1304）和/或显微镜（1408）。

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