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1. 发明申请

US20090310202A1 TILT MIRROR 审中-公开
标题翻译：倾斜镜
公开(公告)号：US20090310202A1
公开(公告)日：2009-12-17
申请号：US12471272
申请日：2009-05-22
申请人： Ki-Suk Woo , Hee-Yeoun Kim , Seung-Do An , Jong-Hyeong Song
发明人： Ki-Suk Woo , Hee-Yeoun Kim , Seung-Do An , Jong-Hyeong Song
IPC分类号： G02B26/08
CPC分类号： G02B26/0858
摘要： A tilt mirror is disclosed. The tilt mirror can include: a reflection portion, which may reflect incident light; a first cantilever, which may be formed on either end of the reflection portion, and which may generate a stress in one direction; a second cantilever, which may be formed on either end of the reflection portion beside the first cantilever, and which may generate a stress in the other direction; and a connector portion, which may connect the reflection portion with one end of the first cantilever and with one end of the second cantilever such that the stress generated in the one direction and the stress generated in the other direction are transferred to the reflection portion. The tilt mirror provides a simple composition that can be utilized to alter the path for rays of light.
摘要翻译：公开了一种倾斜镜。倾斜镜可以包括：反射部分，其可以反射入射光; 第一悬臂，其可以形成在反射部分的任一端上，并且可以在一个方向上产生应力; 第二悬臂，其可以形成在第一悬臂旁边的反射部分的任一端上，并且可以在另一方向上产生应力; 以及连接器部分，其可以将反射部分与第一悬臂的一端和第二悬臂的一端连接，使得沿一个方向产生的应力和在另一个方向上产生的应力被传递到反射部分。倾斜镜提供了可用于改变光线路径的简单组合。

2. 发明授权

US07569973B2 Method for driving piezoelectric element or optical modulator including piezoelectric element 失效
标题翻译：用于驱动包括压电元件的压电元件或光学调制器的方法
公开(公告)号：US07569973B2
公开(公告)日：2009-08-04
申请号：US12128567
申请日：2008-05-28
申请人： Seung-Do An , Jong-Hyeong Song , Anatoliy Lapchuk
发明人： Seung-Do An , Jong-Hyeong Song , Anatoliy Lapchuk
IPC分类号： H01L41/09 , G02F1/00
CPC分类号： G02B26/0858 , H01L41/042
摘要： Disclosed are a method for driving a piezoelectric element or an optical modulator including a piezoelectric element and a recorded medium recorded with a program for executing the same. In accordance with an embodiment of the present invention, the method for driving a piezoelectric element causing a displacement object to be displaced by being contracted or expanded according to a supplied driving voltage, including supplying a driving signal to the piezoelectric element during a first driving period in a first voltage range; supplying a control signal for controlling a polarization hysteresis of the piezoelectric element according to a driving, performed during the first driving period, to the piezoelectric element; and supplying the driving signal to the piezoelectric element during a second driving period in a second voltage range.
摘要翻译：公开了一种用于驱动压电元件或光调制器的方法，该压电元件或光调制器包括压电元件和记录有用于执行该压电元件的程序的记录介质。根据本发明的实施例，一种用于驱动通过根据所提供的驱动电压使位移物体收缩或膨胀的压电元件的方法，包括在第一驱动期间向压电元件提供驱动信号在第一电压范围内; 根据在第一驱动期间执行的驱动，向压电元件提供用于控制压电元件的极化滞后的控制信号; 以及在第二电压范围内的第二驱动期间将所述驱动信号提供给所述压电元件。

3. 发明申请

US20080297903A1 METHOD FOR DRIVING PIEZOELECTRIC ELEMENT OR OPTICAL MODULATOR INCLUDING PIEZOELECTRIC ELEMENT 失效
标题翻译：驱动压电元件或包括压电元件的光学调制器的方法
公开(公告)号：US20080297903A1
公开(公告)日：2008-12-04
申请号：US12128567
申请日：2008-05-28
申请人： Seung-Do An , Jong-Hyeong Song , Anatoliy Lapchuk
发明人： Seung-Do An , Jong-Hyeong Song , Anatoliy Lapchuk
IPC分类号： G02B26/00 , H02N2/06
CPC分类号： G02B26/0858 , H01L41/042
摘要： Disclosed are a method for driving a piezoelectric element or an optical modulator including a piezoelectric element and a recorded medium recorded with a program for executing the same. In accordance with an embodiment of the present invention, the method for driving a piezoelectric element causing a displacement object to be displaced by being contracted or expanded according to a supplied driving voltage, including supplying a driving signal to the piezoelectric element during a first driving period in a first voltage range; supplying a control signal for controlling a polarization hysteresis of the piezoelectric element according to a driving, performed during the first driving period, to the piezoelectric element; and supplying the driving signal to the piezoelectric element during a second driving period in a second voltage range.
摘要翻译：公开了一种用于驱动压电元件或光调制器的方法，该压电元件或光调制器包括压电元件和记录有用于执行该压电元件的程序的记录介质。根据本发明的实施例，一种用于驱动通过根据所提供的驱动电压使位移物体收缩或膨胀的压电元件的方法，包括在第一驱动期间向压电元件提供驱动信号在第一电压范围内; 根据在第一驱动期间执行的驱动，向压电元件提供用于控制压电元件的极化滞后的控制信号; 以及在第二电压范围内的第二驱动期间将所述驱动信号提供给所述压电元件。

4. 发明申请

US20050105157A1 Diffractive thin-film piezoelectric micromirror and method of producing the same 失效
$Diffractive thin-film piezoelectric micromirror and method of producing the same$
标题翻译：衍射薄膜压电微镜及其制造方法
公开(公告)号：US20050105157A1
公开(公告)日：2005-05-19
申请号：US10952556
申请日：2004-09-28
申请人： Sang-Kyeong Yun , Jong-Hyeong Song , Seung-Do An , Min-Suk Oh
发明人： Sang-Kyeong Yun , Jong-Hyeong Song , Seung-Do An , Min-Suk Oh
IPC分类号： B81B3/00 , B81C1/00 , G02B26/06 , G02B26/08 , G09F9/37 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H02N2/00
CPC分类号： G02B26/0808 , G09F9/372
摘要： Disclosed is a diffractive micromirror and a method of producing the same. More particularly, the present invention pertains to a diffractive thin-film piezoelectric micromirror, which is operated in a piezoelectric operation manner to assure excellent displacement, operation speed, reliability, linearity, and low voltage operation, and a method of producing the same. The diffractive thin-film piezoelectric micromirror includes a silicon substrate on which a recess is formed to provide an air space to the center thereof, and a piezoelectric mirror layer having a band shape, which is attached to the silicon substrate along both ends of the recess at both ends thereof while being spaced from the bottom of the recess at a center portion thereof and which includes a thin-film piezoelectric material layer to be vertically movable when voltage is applied to the piezoelectric material layer, and thus diffracts an incident light beam.
摘要翻译：公开了一种衍射微镜及其制造方法。更具体地，本发明涉及以压电操作方式操作以确保优异的位移，操作速度，可靠性，线性和低电压操作的衍射薄膜压电微镜及其制造方法。衍射薄膜压电微反射镜包括硅基板，其上形成有凹部以在其中心提供空气空间;以及具有带状的压电反射镜层，其沿着凹部的两端附接到硅基板同时在其中心部分与凹部的底部间隔开，并且包括薄膜压电材料层，当电压施加到压电材料层时可以垂直移动，从而衍射入射光束。

5. 发明申请

US20080166473A1 METHOD OF PRODUCING DIFFRACTIVE THIN-FILM PIEZOELECTRIC MICROMIRROR 审中-公开
标题翻译：生产薄膜薄膜压电薄膜的方法
公开(公告)号：US20080166473A1
公开(公告)日：2008-07-10
申请号：US11739058
申请日：2007-04-23
申请人： Seung-Do An , Sang Kyeong Yun , Jong-Hyeong Song
发明人： Seung-Do An , Sang Kyeong Yun , Jong-Hyeong Song
IPC分类号： B05D5/12
CPC分类号： G02B26/0808
摘要： Disclosed is a method of producing a diffractive micromirror. More particularly, the present invention pertains to a method of producing a diffractive micromirror, in which a recess having a desired depth and width is precisely formed in a piezoelectric operation manner.
摘要翻译：公开了衍射微镜的制造方法。更具体地，本发明涉及一种制造衍射微镜的方法，其中具有期望的深度和宽度的凹槽以压电操作方式精确地形成。

6. 发明授权

US07209290B2 Diffractive thin-film piezoelectric micromirror and method of producing the same 失效
$Diffractive thin-film piezoelectric micromirror and method of producing the same$
标题翻译：衍射薄膜压电微镜及其制造方法
公开(公告)号：US07209290B2
公开(公告)日：2007-04-24
申请号：US10938133
申请日：2004-09-10
申请人： Seung-Do An , Sang Kyeong Yun , Jong-Hyeong Song
发明人： Seung-Do An , Sang Kyeong Yun , Jong-Hyeong Song
IPC分类号： G02B6/26
CPC分类号： G02B26/0808
摘要： Disclosed is a diffractive micromirror and a method of producing the same. More particularly, the present invention pertains to a diffractive micromirror, in which a recess having a desired depth and width is precisely formed in a piezoelectric operation manner, and a method of producing the same.
摘要翻译：公开了一种衍射微镜及其制造方法。更具体地说，本发明涉及一种衍射微镜，其中以压电操作方式精确地形成具有所需深度和宽度的凹部及其制造方法。

7. 发明申请

US20080095531A1 DEVICE AND METHOD FOR INSPECTING OPTICAL MODULATOR 审中-公开
标题翻译：用于检查光学调制器的装置和方法
公开(公告)号：US20080095531A1
公开(公告)日：2008-04-24
申请号：US11863096
申请日：2007-09-27
申请人： In-Jae Yeo , Sang-Kyeong Yun , Seung-Do An , Kyu-Bum Han , Jong-Hyeong Song , Yoon-Shik Hong
发明人： In-Jae Yeo , Sang-Kyeong Yun , Seung-Do An , Kyu-Bum Han , Jong-Hyeong Song , Yoon-Shik Hong
IPC分类号： H04B10/08
CPC分类号： G09G3/006 , G02B26/001 , G02B26/0808 , G09G3/02 , G09G3/3433 , G09G2360/145
摘要： An aspect of the present invention provides a device for inspecting an optical modulator. The device can comprise: a probe card that converts an inputted control signal to a driving signal, and provide the driving signal by contacting with each driving signal input pad of an optical modulator—wherein the optical modulator comprises one or more micromirrors and one or more driving signal input pads connected to the micromirrors, respectively, and the micromirror moves up and down according to the driving signal inputted through the driving signal input pad—; and an image control circuit that generates the control signal for checking if the optical modulator is operation properly, and is connected electrically to the probe card to transmit the control signal. A device and a method for inspecting an optical modulator according to the present invention can inspect performance and function of the optical modulator at a chip level.
摘要翻译：本发明的一个方面提供了一种用于检查光学调制器的装置。该装置可以包括：探针卡，其将输入的控制信号转换为驱动信号，并通过与光学调制器的每个驱动信号输入焊盘接触来提供驱动信号，其中光学调制器包括一个或多个微镜和一个或多个分别连接到微镜的驱动信号输入焊盘，微镜根据通过驱动信号输入焊盘输入的驱动信号上下移动; 以及图像控制电路，其生成用于检查光调制器是否正常工作的控制信号，并且与探针卡电连接以发送控制信号。根据本发明的用于检查光学调制器的装置和方法可以在芯片级检查光调制器的性能和功能。

8. 发明授权

US07626745B2 Diffractive thin-film piezoelectric micromirror and method of producing the same 失效
$Diffractive thin-film piezoelectric micromirror and method of producing the same$
标题翻译：衍射薄膜压电微镜及其制造方法
公开(公告)号：US07626745B2
公开(公告)日：2009-12-01
申请号：US10952556
申请日：2004-09-28
申请人： Sang Kyeong Yun , Jong-Hyeong Song , Seung-Do An , Min-Suk Oh
发明人： Sang Kyeong Yun , Jong-Hyeong Song , Seung-Do An , Min-Suk Oh
IPC分类号： G02B26/12
CPC分类号： G02B26/0808 , G09F9/372
摘要： Disclosed is a diffractive micromirror and a method of producing the same. More particularly, the present invention pertains to a diffractive thin-film piezoelectric micromirror, which is operated in a piezoelectric operation manner to assure excellent displacement, operation speed, reliability, linearity, and low voltage operation, and a method of producing the same. The diffractive thin-film piezoelectric micromirror includes a silicon substrate on which a recess is formed to provide an air space to the center thereof, and a piezoelectric mirror layer having a band shape, which is attached to the silicon substrate along both ends of the recess at both ends thereof while being spaced from the bottom of the recess at a center portion thereof and which includes a thin-film piezoelectric material layer to be vertically movable when voltage is applied to the piezoelectric material layer, and thus diffracts an incident light beam.
摘要翻译：公开了一种衍射微镜及其制造方法。更具体地，本发明涉及以压电操作方式操作以确保优异的位移，操作速度，可靠性，线性和低电压操作的衍射薄膜压电微镜及其制造方法。衍射薄膜压电微反射镜包括硅基板，其上形成有凹部以在其中心提供空气空间;以及具有带状的压电反射镜层，其沿着凹部的两端附接到硅基板同时在其中心部分与凹部的底部间隔开，并且包括薄膜压电材料层，当电压施加到压电材料层时可以垂直移动，从而衍射入射光束。

9. 发明授权

US07468825B2 Spatial optical modulator with passivation layer 失效
标题翻译：具有钝化层的空间光学调制器
公开(公告)号：US07468825B2
公开(公告)日：2008-12-23
申请号：US11591226
申请日：2006-10-31
申请人： Je-Hong Kyoung , Jae-Wook Jang , Jong-Hyeong Song , Yun-Jin Ko , Seung-Do An
发明人： Je-Hong Kyoung , Jae-Wook Jang , Jong-Hyeong Song , Yun-Jin Ko , Seung-Do An
IPC分类号： G02B26/08
CPC分类号： G02B26/0858 , G02B6/3516 , G02B6/3578 , G02B6/3584 , G02B26/0808
摘要： Disclosed is an optical modulator including: a substrate; an insulation layer disposed on the substrate; a ribbon layer, a center portion of which is spaced apart from the insulation layer by a predetermined gap; a piezoelectric element that is disposed on the ribbon layer and allows the center portion of the ribbon layer to bend vertically; and a passivation layer that is disposed on the piezoelectric element and comprises a main passivation film.
摘要翻译：公开了一种光调制器，包括：基板; 设置在所述基板上的绝缘层; 带状层，其中心部分与绝缘层隔开预定的间隙; 压电元件，其设置在所述带状层上并允许所述带状层的中心部分垂直弯曲; 以及设置在压电元件上并包括主钝化膜的钝化层。

10. 发明申请

US20070097488A1 Spatial optical modulator with passivation layer 失效
标题翻译：具有钝化层的空间光学调制器
公开(公告)号：US20070097488A1
公开(公告)日：2007-05-03
申请号：US11591226
申请日：2006-10-31
申请人： Je-Hong Kyoung , Jae-Wook Jang , Jong-Hyeong Song , Yun-Jin Ko , Seung-Do An
发明人： Je-Hong Kyoung , Jae-Wook Jang , Jong-Hyeong Song , Yun-Jin Ko , Seung-Do An
IPC分类号： G02B26/00
CPC分类号： G02B26/0858 , G02B6/3516 , G02B6/3578 , G02B6/3584 , G02B26/0808
摘要： Disclosed is an optical modulator including: a substrate; an insulation layer disposed on the substrate; a ribbon layer, a center portion of which is spaced apart from the insulation layer by a predetermined gap; a piezoelectric element that is disposed on the ribbon layer and allows the center portion of the ribbon layer to bend vertically; and a passivation layer that is disposed on the piezoelectric element and comprises a main passivation film.
摘要翻译：公开了一种光调制器，包括：基板; 设置在所述基板上的绝缘层; 带状层，其中心部分与绝缘层隔开预定的间隙; 压电元件，其设置在所述带状层上并允许所述带状层的中心部分垂直弯曲; 以及设置在压电元件上并包括主钝化膜的钝化层。

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