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1. 发明申请

WO2009084766A1 COMPLEX FUNCTION MICROMETER USING HETERODYNE INTERFEROMETER AND SCANNING METHOD 审中-公开
标题翻译：复杂功能微机使用异位干扰仪和扫描方法
公开(公告)号：WO2009084766A1
公开(公告)日：2009-07-09
申请号：PCT/KR2008/000672
申请日：2008-02-04
申请人： INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SOGANG UNIVERSITY , CHO, Kyu-Man , KWON, Kang-Hyuk
发明人： CHO, Kyu-Man , KWON, Kang-Hyuk
IPC分类号： G01B9/02
CPC分类号： G01B9/02063 , G01B9/02002 , G01B9/02068
摘要： The present invention relates to a complex function micrometer using an I/Q interferometer. The complex function micrometer includes an I/Q interferometer converting a probe beam which includes information with respect to a sample to I signal and Q signal and outputting the signals, a sample die on which the sample is disposed, an XY scanner, a scanner driver, a up/down lift, a micro-distance adjusting device, a focusing/collimating device, and a computer. The computer transfers a movement control signal for controlling the movement of the XY scanner to the scanner driver or transfers a signal for controlling the movement of the up/down lift to the micro-distance adjusting device, and receives the I signal and Q signal provided from the I/Q interferometer to extract information with respect to the surface or inside of the sample. The complex function micrometer performs a multilayer scanning or a constant phase scanning with respect to the sample to obtain information with respect to structure of surface or inside of the sample.
摘要翻译：本发明涉及使用I / Q干涉仪的复合功能测微计。复合功能测微计包括I / Q干涉仪，其将探测光束转换成相对于样本的信号到I信号和Q信号并输出信号，其上放置样品的样品芯片，XY扫描仪，扫描仪驱动器，上下升降机，微距调节装置，聚焦/准直装置和计算机。计算机传送用于控制XY扫描器移动到扫描仪驱动器的移动控制信号，或者传送用于控制上/下升程移动到微距离调节装置的信号，并且接收提供的I信号和Q信号从I / Q干涉仪提取关于样品表面或内部的信息。复合功能测微计相对于样品进行多层扫描或恒相扫描，以获得关于表面结构或样品内部的信息。

2. 发明申请

WO2009017291A1 SCANNING MICROMETER USING HETERODYNE INTERFEROMETER 审中-公开
标题翻译：扫描微机使用异位干涉仪
公开(公告)号：WO2009017291A1
公开(公告)日：2009-02-05
申请号：PCT/KR2008/000671
申请日：2008-02-04
申请人： INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SOGANG UNIVERSITY , CHO, Kyu-Man , KWON, Kang-Hyuk
发明人： CHO, Kyu-Man , KWON, Kang-Hyuk
IPC分类号： H01J37/26
CPC分类号： G01B9/0207 , G01B9/02003 , G01B9/02081 , G01B2290/70
摘要： The present invention relates to a scanning micrometer using a heterodyne interferometer. A scanning micrometer using a heterodyne interferometer includes: a heterodyne interferometer providing a probe beam to a sample, and converting the probe beam and a reference beam focused and collimated with respect to the sample into an I signal and a Q signal and outputting the I and Q signals; an analogue to digital (A/D) converter converting the I signal and the Q signal outputted form the heterodyne interferometer into digital signals; and a computer receiving the digitalized I signal and Q signal provided from the A/D converter to extract information with respect to the surface of the sample. Therefore, it is possible to obtain and analyze physical and structural information with respect to surface or inside of the sample using a heterodyne interferometer having an I/Q demodulator.
摘要翻译：本发明涉及使用外差干涉仪的扫描测微计。使用外差干涉仪的扫描测微计包括：外差干涉仪，其向样品提供探针光束，并将探针光束和相对于样品聚焦和准直的参考光束转换为I信号和Q信号，并输出I和 Q信号; 将从外差干涉仪输出的I信号和Q信号转换为数字信号的模数（A / D）转换器; 以及计算机，接收从A / D转换器提供的数字I信号和Q信号，以提取关于样品表面的信息。因此，可以使用具有I / Q解调器的外差干涉仪来获取和分析关于样品的表面或内部的物理和结构信息。

3. 发明申请

WO2009064039A1 APPARATUS FOR INSPECTING HOMOGENEITY OF THE COEFFICIENT OF THE OPTICALLY INDUCED LINEAR BIREFRINGENCE IN THIN FILM 审中-公开
标题翻译：用于检查薄膜中光学诱导线性绕射系数的均匀性的装置
公开(公告)号：WO2009064039A1
公开(公告)日：2009-05-22
申请号：PCT/KR2008/000670
申请日：2008-02-04
申请人： INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SOGANG UNIVERSITY , CHO, Kyu-Man , PARK, Young-Kyu
发明人： CHO, Kyu-Man , PARK, Young-Kyu
IPC分类号： G01J3/28 , G01N33/48
CPC分类号： G01N21/23 , G01N21/1717
摘要： The present invention relates to an apparatus for inspecting homogeneity of a nonlinear coefficient in a sample. The apparatus comprises: a scanner arranged with a sample to be inspected and moving it along X and Y directions; a pumping system deriving birefringence by a light Kerr effect for the sample arranged on the scanner; an interferometer measuring the birefringence in the sample; and a control computer calculating the nonlinear coefficient values using the birefringence provided from the interferometer. The control computer receives the birefringence for all positions in the measurement region in the sample from the interferometer while moving the scanner in the X and Y directions along the measurement region in the sample, extracts the nonlinear coefficient values using the birefringence and the light source intensity values of the pumping system, and prepares and provides a 3D image using all the nonlinear coefficient values extracted for the measurement region in the sample. With the present invention, the nonlinear coefficients for the measurement region in the sample being the nonlinear medium are prepared and provided as the image, thereby making it possible to inspect the homogeneity of the nonlinear coefficient value.
摘要翻译：本发明涉及一种用于检查样品中非线性系数均匀性的装置。该装置包括：扫描仪，其布置有要检查的样品并沿X和Y方向移动; 泵送系统通过用于布置在扫描仪上的样品的光克尔效应得到双折射; 测量样品中双折射的干涉仪; 以及使用由干涉仪提供的双折射率计算非线性系数值的控制计算机。控制计算机沿着样品中的测量区域在扫描仪沿X和Y方向移动扫描仪时，从干涉仪接收样品中测量区域中的所有位置的双折射，使用双折射和光源强度提取非线性系数值泵送系统的值，并准备并提供使用为样本中的测量区域提取的所有非线性系数值的3D图像。利用本发明，准备作为非线性介质的样本中的测量区域的非线性系数作为图像，从而可以检查非线性系数值的均匀性。

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