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1. 发明专利

CA2423342A1 IMPROVED PRESSURE-TYPE FLOW RATE CONTROL APPARATUS 未知
公开(公告)号：CA2423342A1
公开(公告)日：2003-06-28
申请号：CA2423342
申请日：2002-11-22
申请人： TOKYO ELECTRON LTD , FUJIKIN KK , OHMI TADAHIRO
发明人： UNO TOMIO , NISHINO KOUJI , DOHI RYOUSUKE , NAKAMURA OSAMU , SUGIYAMA KAZUHIKO , MATSUMOTO ATSUSHI , INUI SHUJIRO , IKEDA NOBUKAZU , SAKAI TAIJI , OHMI TADAHIRO , UEYAMA MASANORI
IPC分类号： G01F1/00 , G01F1/36 , G01F1/42 , G05D7/06 , G05D7/00
摘要： Provided is an improved pressure-type flow rate control apparatus that can control The flow rate of a fluid with great precision using an empirical formula. The empiric al formula can provide values that closely fit with the actual flow rates of a compressible fluid under non-critical conditions. The improved pressure-type flow rate control apparatus can control the flow rate of fluid passing through an orifice 4 to a target flow rate with accuracy and at a hi gh speed. The empirical formula for the compressible fluid under non-critical conditions (sub-sonic) is expressed as Qc = KP2m(P1 - P2)n and the flow rate of fluid passing through orifice 4 is calculated by: Qc - KP2m(P1 - P2)n (K is a proportional constant; and m and n are constants) so that the flow rate of fluid passing through the orifice 4 can be controll ed to the target flow rate with high precision at a high speed. Also provided is an improved pressure-type flow rate control apparatus in which a pressure ratio P2/P1 = r, obtained from an upstream pressure P1 and a downstream pressure P2 is constantly compared with a critical value rc, and under critical conditions (r .ltoreq. r c), the flow rate is calculated by Qc = KP1. Under non-critical conditions (r = r c), the flow rate is calculated by Qc = KP2m(P1 - P2)n, so thatthe glow rate is controlled to the target flow rate with accuracy at a high spee d depending upon the conditions of fluid.

2. 发明公开

EP1475684A4 ADVANCED PRESSURE TYPE FLOW CONTROL DEVICE 有权
标题翻译： VERBESSERTESTRÖMUNGUNGSSTEUEREINRICHTUNGDES DRUCKTYPS
公开(公告)号：EP1475684A4
公开(公告)日：2005-09-07
申请号：EP02781829
申请日：2002-11-22
申请人： FUJIKIN KK , TOKYO ELECTRON LTD
发明人： OHMI TADAHIRO , UNO TOMIO , NAKAMURA OSAMU , IKEDA NOBUKAZU , DOHI RYOUSUKE , NISHINO KOUJI , MATSUMOTO ATSUSHI , SUGIYAMA KAZUHIKO , INUI SHUJIRO , SAKAI TAIJI , UEYAMA MASANORI
IPC分类号： G01F1/00 , G01F1/36 , G01F1/42 , G05D7/06
CPC分类号： G05D7/0635 , Y10T137/7759 , Y10T137/7761
摘要： An advanced pressure type flow control device capable of accurately controlling a flow by using an experimental flow expression established to accurately fit to the actual flow of compressible fluid in a non-critical area, wherein the experimental flow expression of the compressible fluid in the non-critical area non-sound velocity area is expressed as Qc = KP2m P1 - P2n, and the fluid flow passing through an orifice 4 is calculated by using the expression Qc = KP2m P1 - P2n K is a proportional constant, m and n are constants so that the flow can be accurately and rapidly controlled to a specified one, and a pressure ratio P2/P1 = r provided by an upstream side pressure P1 and a downstream side pressure P2 is always compared with a critical value rc and the flow is calculated by using an expression Qc = KP1 under the critical condition of r rc so that the flow can be accurately and rapidly controlled to the specified one in correspondence to all conditions of the fluid.
摘要翻译：一种先进的压力型流量控制装置，其能够通过使用所建立的实验流量表达准确地控制流量，所述实验流量表达准确地适应非临界区域中的可压缩流体的实际流量，其中，临界区域非声速区域表示为Qc = KP2mP1-P2n，并且通过节流孔4的流体流量通过使用以下表达式来计算Qc = KP2m P1-P2n K是比例常数，m和n是常数可以将流量精确而快速地控制到特定的流量，并且总是将由上游侧压力P1和下游侧压力P2提供的压力比P2 / P1 = r与临界值rc进行比较，并且通过在r rc的非临界条件下使用表达式Qc = KP2m P1-P2n，从而可以将流量精确且快速地控制为指定的一个对应于流体的所有条件。

3. 发明专利

DE60219365T2 未知
公开(公告)号：DE60219365T2
公开(公告)日：2007-08-09
申请号：DE60219365
申请日：2002-11-22
申请人： TOKYO ELECTRON LTD , FUJIKIN KK
发明人： OHMI TADAHIRO , UNO TOMIO , NAKAMURA OSAMU , IKEDA NOBUKAZU , DOHI RYOUSUKE , NISHINO KOUJI , MATSUMOTO ATSUSHI , SUGIYAMA KAZUHIKO , INUI SHUJIRO , SAKAI TAIJI , UEYAMA MASANORI
IPC分类号： G01F1/00 , G05D7/06 , G01F1/36 , G01F1/42
摘要： Provided is an improved pressure-type flow rate control apparatus that can control the flow rate of a fluid with great precision using an empirical formula. The empirical formula can provide values that closely fit with the actual flow rates of a compressible fluid under non-critical conditions. The improved pressure-type flow rate control apparatus can control the flow rate of fluid passing through an orifice 4 to a target flow rate with accuracy and at a high speed. The empirical formula for the compressible fluid under non-critical conditions (sub-sonic) is expressed as Qc = KP2 (P1 - P2) and the flow rate of fluid passing through orifice 4 is calculated by: Qc = KP2 (P1 - P2) (K is a proportional constant; and m and n are constants) so that the flow rate of fluid passing through the orifice 4 can be controlled to the target flow rate with high precision at a high speed. Also provided is an improved pressure-type flow rate control apparatus in which a pressure ratio P2/P1 = r, obtained from an upstream pressure P1 and a downstream pressure P2 is constantly compared with a critical value rc, and under critical conditions (r ≤ rc), the flow rate is calculated by : Qc = KP1. Under non-critical conditions (r > rc), the flow rate is calculated by Qc = KP2 (P1 - P2) , so that the flow rate is controlled to the target flow rate with accuracy at a high speed depending upon the conditions of fluid.

4. 发明专利

DE60219365D1 未知
公开(公告)号：DE60219365D1
公开(公告)日：2007-05-16
申请号：DE60219365
申请日：2002-11-22
申请人： TOKYO ELECTRON LTD , FUJIKIN KK
发明人： OHMI TADAHIRO , UNO TOMIO , NAKAMURA OSAMU , IKEDA NOBUKAZU , DOHI RYOUSUKE , NISHINO KOUJI , MATSUMOTO ATSUSHI , SUGIYAMA KAZUHIKO , INUI SHUJIRO , SAKAI TAIJI , UEYAMA MASANORI
IPC分类号： G01F1/00 , G05D7/06 , G01F1/36 , G01F1/42
摘要： Provided is an improved pressure-type flow rate control apparatus that can control the flow rate of a fluid with great precision using an empirical formula. The empirical formula can provide values that closely fit with the actual flow rates of a compressible fluid under non-critical conditions. The improved pressure-type flow rate control apparatus can control the flow rate of fluid passing through an orifice 4 to a target flow rate with accuracy and at a high speed. The empirical formula for the compressible fluid under non-critical conditions (sub-sonic) is expressed as Qc = KP2 (P1 - P2) and the flow rate of fluid passing through orifice 4 is calculated by: Qc = KP2 (P1 - P2) (K is a proportional constant; and m and n are constants) so that the flow rate of fluid passing through the orifice 4 can be controlled to the target flow rate with high precision at a high speed. Also provided is an improved pressure-type flow rate control apparatus in which a pressure ratio P2/P1 = r, obtained from an upstream pressure P1 and a downstream pressure P2 is constantly compared with a critical value rc, and under critical conditions (r ≤ rc), the flow rate is calculated by : Qc = KP1. Under non-critical conditions (r > rc), the flow rate is calculated by Qc = KP2 (P1 - P2) , so that the flow rate is controlled to the target flow rate with accuracy at a high speed depending upon the conditions of fluid.

5. 发明专利

CA2423342C IMPROVED PRESSURE-TYPE FLOW RATE CONTROL APPARATUS 未知
公开(公告)号：CA2423342C
公开(公告)日：2007-03-06
申请号：CA2423342
申请日：2002-11-22
申请人： TOKYO ELECTRON LTD , FUJIKIN KK , OHMI TADAHIRO
发明人： DOHI RYOUSUKE , MATSUMOTO ATSUSHI , SUGIYAMA KAZUHIKO , OHMI TADAHIRO , NISHINO KOUJI , NAKAMURA OSAMU , UNO TOMIO , INUI SHUJIRO , IKEDA NOBUKAZU , SAKAI TAIJI , UEYAMA MASANORI
IPC分类号： G01F1/00 , G05D7/00 , G01F1/36 , G01F1/42 , G05D7/06
摘要： Provided is an improved pressure-type flow rate control apparatus that can control the flow rate of a fluid with great precision using an empirical formula. The empiric al formula can provide values that closely fit with the actual flow rates of a compressible fluid under non-critical conditions. The improved pressure-type flow rate control apparatus can control the flow rate of fluid passing through an orifice 4 to a target flow rate with accuracy and at a hi gh speed. The empirical formula for the compressible fluid under non-critical conditions (sub-sonic) is expressed as Qc = KP2m(P1 - P2)n and the flow rate of fluid passing through orifice 4 is calculated by: Qc = KP2m(P1 - P2)n (K is a proportional constant; and m and n are constants) so that the flow rate of fluid passing through the orifice 4 can be controll ed to the target flow rate with high precision at a high speed. Also provided is an improved pressure-type flow rate control apparatus in which a pressure ratio P2/P1 = r, obtained from an upstream pressure P1 and a downstream pressure P2 is constantly compared with a critical value rc, and under critical conditions (r .ltoreq. r c), the flow rate is calculated by Qc = KP1. Under non-critical conditions (r > r c), the flow rate is calculated by Q c = KP2m(P1 - P2)n, so that the flow rate is controlled to the target flow rate with accuracy at a high spee d depending upon the conditions of fluid.

6. 发明专利

JP2003195948A IMPROVED PRESSURE TYPE FLOW CONTROL DEVICE 审中-公开
公开(公告)号：JP2003195948A
公开(公告)日：2003-07-11
申请号：JP2001399433
申请日：2001-12-28
申请人： OMI TADAHIRO , TOKYO ELECTRON LTD , FUJIKIN KK
发明人： OMI TADAHIRO , INUI HIDEJIRO , SAKAI TAIJI , UEYAMA MASAYOSHI , SUGIYAMA KAZUHIKO , UNO TOMIO , IKEDA SHINICHI , NISHINO KOJI , NAKAMURA OSAMU , DOI RYOSUKE , MATSUMOTO SENSHI
IPC分类号： G01F1/00 , G01F1/36 , G01F1/42 , G05D7/06
摘要： PROBLEM TO BE SOLVED: To develop an improved pressure type flow control device establishing an empirical flow formula fitted with high precession to an actual flow amount of a compressible fluid in a non-critical region and performing flow control with high precision using the empirical flow formula. SOLUTION: The improved pressure type flow control device expressing the empirical flow formula for the compressible fluid in the non-critical region (non-sonic region) as Qc=KP 2 m (P 1 -P 2 ) n (wherein K is a proportionality constant; m and n are each constants) and calculating the flow amount passing an orifice 4 using the formula Qc=KP 2 m (P 1 -P 2 ) n accurately and speedily controls flow to be the target flow. A pressure ratio P 2 /P 1 =r obtained from an upstream pressure P 1 and a downstream pressure P 2 is always compared with a critical value r c . The flow amount is calculated using Qc=KP 1 for a critical condition (r≤r c ), and using Qc=KP 2 m (P 1 -P 2 ) n for a critical condition (r>r c ). The flow control device then accurately and speedily controls the flow amount to be the target flow amount while corresponding to all conditions of the fluid. COPYRIGHT: (C)2003,JPO

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