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1. 发明授权

US6037574A Quartz substrate heater 失效
标题翻译：石英基板加热器
公开(公告)号：US6037574A
公开(公告)日：2000-03-14
申请号：US964385
申请日：1997-11-06
申请人： Christopher C. Lanham , Kevin Ptasienski , Louis P. Steinhauser , Robin H. Lake , James H. Kreisel
发明人： Christopher C. Lanham , Kevin Ptasienski , Louis P. Steinhauser , Robin H. Lake , James H. Kreisel
IPC分类号： H05B3/46 , H05B3/10 , H05B3/28 , H05B3/44
CPC分类号： H05B3/28
摘要： An electric, resistance element heater utilizes quartz as a sheath material and has a resistance (heating) element that is in intimate, substantially continuous contact with a surface of the quartz. This allows the heater to operate in any one or all of the three modes of heat transfer, namely, radiation, conduction and convection. Such intimate, substantially continuous contact of the resistance element is achieved by applying the element in direct contact with the quartz surface. This is accomplished by applying a heating circuit directly to the quartz surface, which heating element can be a foil element, or a thick or a thin film deposition element. The overall heater is formed by covering the heater element by a quartz sheath and attaching leads formed on the ends of the heater element to a source of electric energy. Sensors such as thermocouples, RTD's and the like can also be incorporated directly into the heater structure. Also, the heater can be fashioned into a variety of shapes.
摘要翻译：电阻元件加热器采用石英作为护套材料，并具有与石英表面紧密，基本上连续接触的电阻（加热）元件。这允许加热器在三种传热模式，即辐射，传导和对流中的任何一种或全部中操作。通过施加与石英表面直接接触的元件来实现电阻元件的这种紧密，基本上连续的接触。这是通过将加热电路直接施加到石英表面，该加热元件可以是箔元件或厚的或薄膜沉积元件来实现的。整个加热器是通过用石英护套覆盖加热器元件并将形成在加热器元件的端部上的引线附着到电能源上而形成的。诸如热电偶，RTD等的传感器也可以直接结合到加热器结构中。此外，加热器可以被制成各种形状。

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