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    • 5. 发明授权
    • Electrostatic force detector with cantilever and shield for an electrostatic force microscope
    • 带静电力显微镜的悬臂和屏蔽静电力检测器
    • US06337478B1
    • 2002-01-08
    • US09434668
    • 1999-11-05
    • Toshio UeharaAkiyoshi ItohKatsuji NakagawaManabu TaniBruce T. Williams
    • Toshio UeharaAkiyoshi ItohKatsuji NakagawaManabu TaniBruce T. Williams
    • G01R2912
    • G01Q60/30Y10S977/852Y10S977/864
    • An electrostatic force microscope for measuring electrostatic force of a sample under test including a detector comprising a cantilever arm having a tip formation at one end and located so that electrostatic force is induced at the tip due to electrostatic charge on the sample under test, an optical system for transforming bending of the cantilever arm due to electrostatic force induced at the tip into an electrical signal containing a frequency component of the electrostatic force induced at the detector tip, a source for applying bias voltage to the detector, a detector for detecting the frequency component of the electrostatic force induced at the detector tip so that a measurement of electrostatic force on the sample under test can be obtained, and an electrostatic shield operatively associated with the cantilever arm. The shield is located between the cantilever arm and the sample under test, in particular in close spaced relation to the arm. The cantilever arm and the shield are maintained at the same electrical potential so that lines of electrostatic force are terminated at the shield.
    • 一种用于测量被测样品的静电力的静电力显微镜,包括检测器,该检测器包括悬臂,所述悬臂臂在一端具有尖端形成,并且定位成使得由于被测试样品上的静电荷引起的尖端处的静电力,光学 用于将由尖端引起的静电力引起的悬臂的弯曲变形为包含在检测器尖端感应的静电力的频率分量的电信号的系统,用于向检测器施加偏置电压的源,用于检测频率的检测器 在检测器尖端处感应的静电力的分量,使得可以获得在被测试样品上的静电力的测量,以及与悬臂相配合的静电屏蔽。 屏蔽位于悬臂与试验样品之间,特别是与臂紧密隔开。 悬臂和屏蔽件保持相同的电位,使得静电力线在屏蔽处终止。