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    • 1. 发明授权
    • Array type X-ray detection apparatus
    • 阵列型X射线检测装置
    • US06891163B2
    • 2005-05-10
    • US10148829
    • 2000-12-06
    • Katsuyuki KanekoHiroshi TsutsuiShinichi NakaharaYasuhiko Shinkaji
    • Katsuyuki KanekoHiroshi TsutsuiShinichi NakaharaYasuhiko Shinkaji
    • H04N5/32H04N5/374G01T1/24H01L31/08
    • H01L27/14659H04N5/32H04N5/374
    • In order to prevent destruction of a read gate by excessive storage of charge without any addition or change to the manufacturing process, the array type X-ray detection apparatus using a direct conversion system, which directly converts irradiation X-rays to charge, provides each pixel cell with a sensor section for converting X-rays to an amount of charge according to the amount of X-rays, a charge collecting electrode for storing the charge generated, a read gate for transferring the stored charge to an external read amplifier and a MIS diode using a TFT. A clamp signal is applied to one end of the MIS diode. The read gate and MIS diode are formed in the same manufacturing process. Since the amount of charge stored in the charge collecting electrode is clamped to the amount of charge corresponding to the clamp signal voltage by the MIS diode, the read gate is not destroyed even with excessive X-ray irradiation. Furthermore, instead of the MIS diode, a cutoff voltage control circuit and a cutoff gate using a TFT connected to the cutoff voltage control circuit are provided. When the output of the charge storage capacitor exceeds a cutoff voltage, the cutoff gate interrupts the inflow of charge to the charge storage capacitor to suppress further increase of output, thus preventing the read gate from being destroyed.
    • 为了通过过量的电荷储存来防止读取门的破坏,而不会对制造过程产生任何的添加或改变,使用将照射X射线直接转换成电荷的直接转换系统的阵列型X射线检测装置, 像素单元,其具有用于根据X射线量将X射线转换成电荷量的传感器部分,用于存储产生的电荷的电荷收集电极,用于将存储的电荷传送到外部读取放大器的读取栅极和 使用TFT的MIS二极管。 钳位信号施加到MIS二极管的一端。 读栅极和MIS二极管在相同的制造工艺中形成。 由于存储在电荷收集电极中的电荷量被钳位到由MIS二极管对应于钳位信号电压的电荷量,所以即使用过量的X射线照射,读门也不会被破坏。 此外,代替MIS二极管,提供使用连接到截止电压控制电路的TFT的截止电压控制电路和截止门。 当电荷存储电容器的输出超过截止电压时,截止栅极中断电荷向电荷存储电容器的流入,以抑制输出的进一步增加,从而防止读闸门被破坏。