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    • 7. 发明申请
    • SELF-ALIGNED LOCALLY DEEP- DIFFUSED EMITTER SOLAR CELL
    • 自对准的局部深层发光太阳能电池
    • WO1997013280A1
    • 1997-04-10
    • PCT/US1996015755
    • 1996-10-01
    • EBARA SOLAR, INC.SALAMI, JalalSHIBATA, AkioMEIER, Daniel, L.KOCHKA, Edgar, L.
    • EBARA SOLAR, INC.
    • H01L31/06
    • H01L31/068H01L31/022425H01L31/1804Y02E10/547Y02P70/521
    • A solar cell (10) having self-aligned metal electrodes (14) and underlying relatively deep emitter regions (21) joined by relatively shallow emitter regions (22) under the surface not covered by the electrodes is formed in a semiconductive substrate (12) by forming relatively shallow p+ and n+ diffusion regions on the front and back surfaces, respectively, of a silicon semiconductive substrate (12), screen printing aluminum onto the front surface of the substrate in a desired electrode pattern, heat treating the developing cell to form the relatively deep p+ type emitter regions (21) underneath the electrode pattern, while growing an oxide passivation layer (18) over the uncovered portions of the substrate surface, applying an antireflective coating (19) to the front surface in the regions not covered by the electrodes, and screen printing silver (20) over the electrodes on the front surface and over the back surface of the solar cell.
    • 在半导体衬底(12)中形成具有自对准金属电极(14)的太阳能电池(14)和位于相对较浅的发射极区域(21)之下的相对浅的发射极区域(22) 通过在硅半导体基板(12)的前表面和后表面上形成相对较浅的p +和n +扩散区域,以期望的电极图案将印刷铝丝网印刷到基板的前表面上,热处理显影单元以形成 在电极图案下方的相对较深的p +型发射极区域(21),同时在衬底表面的未覆盖部分上生长氧化物钝化层(18),在未覆盖的区域中的前表面上施加抗反射涂层(19) 电极和丝网印刷银(20)在太阳能电池的前表面和背面上的电极上。