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    • 4. 发明申请
    • DARK FIELD DETECTION APPARATUS WITH TRAVELING LENS MULTI-BEAM SCANNER AND A METHOD THEREOF
    • 具有行驶镜头多光束扫描仪的暗场检测装置及其方法
    • WO2003083450A1
    • 2003-10-09
    • PCT/US2003/006706
    • 2003-03-14
    • APPLIED MATERIALS ISRAEL LTD.NAFTALI, RonREINHORN, Silviu
    • NAFTALI, RonREINHORN, Silviu
    • G01N21/00
    • G01N21/9501G01N21/8806G01N2021/8825G02B21/002G02B21/125
    • A system for dark-field inspection of a specimen, such as a semiconductor wafer (108), that uses a laser light source (101) for providing a beam of light. The system includes a light source (101) providing a beam, a traveling lens acousto-optic device (104) having an active region and responsive to an RF input signal to concurrently generate multiple traveling lenses in said active region, each lens having a focus, said traveling lens acousto-optic device (104) being operative to receive the light beam and generate multiple spot beams at the respective focus of each of the generated traveling lenses, said multiple spot beams scanning a first surface of said specimen, whereby a corresponding plurality of at least one of reflected beams and transmitted beams are generated; whereas at least one of reflected beams and transmitted beams comprises bright field and dark field components, and dark field optics for collecting and detecting the dark field component.
    • 一种用于对使用激光光源(101)提供光束的诸如半导体晶片(108)的样本进行暗场检查的系统。 该系统包括提供光束的光源(101),具有有源区域的行进透镜声光装置(104),并且响应于RF输入信号以在所述有源区域中同时产生多个行进透镜,每个透镜具有焦点 ,所述行进透镜声光装置(104)可操作以接收所述光束并在所生成的每个所述行进透镜的相应焦点处产生多个点光束,所述多个光束扫描所述样本的第一表面,由此相应地 产生多个反射光束和透射光束中的至少一个; 而反射光束和透射光束中的至少一个包括明场和暗场分量,以及用于收集和检测暗场分量的暗场光学器件。
    • 5. 发明申请
    • OPTICAL DEVICE FOR RELAYING POLYCHROMATIC LIGHT
    • 用于继续多色光的光学装置
    • WO2009083977A3
    • 2009-09-17
    • PCT/IL2008001691
    • 2008-12-29
    • MIRAGE INNOVATIONS LTDREINHORN SILVIUCOHEN YORAMELDAR AMIRAMITZKOVITCH MOTI
    • REINHORN SILVIUCOHEN YORAMELDAR AMIRAMITZKOVITCH MOTI
    • G02B27/01
    • G02B6/0035G02B5/18G02B6/0016G02B6/0038G02B27/0172G02B2027/0116G02B2027/0123G02B2027/0136G02B2027/0174
    • An optical relay device, for relaying polychromatic light is disclosed. The device comprises: an input optical element formed in a planar substrate for receiving and redirecting the light for propagation of the light in a lateral direction within the substrate; and an output optical element formed in the substrate for receiving light propagating within the substrate and coupling the light out of the substrate. The device further comprises a reflector assembly at least partially coating opposite surfaces of the substrate for substantially reflecting light rays impinging on the reflector assembly at an angle within a first angular range, and substantially transmitting light rays of the polychromatic light impinging on the reflector assembly at an angle within a second angular range. In some embodiments of the present invention the input optical element and the output optical element are diffraction gratings having a periodic profile shaped such that at least one portion of the light is dominantly coupled into a diffraction order m satisfying |m| > 1.
    • 公开了一种用于中继多色光的光学中继装置。 该装置包括:输入光学元件,其形成于平面基板中,用于接收光并将光重定向,以在基板内沿横向传播光; 以及输出光学元件,形成在所述基板中,用于接收在所述基板内传播的光并将所述光耦合到所述基板之外。 该装置还包括反射器组件,该反射器组件至少部分地涂覆衬底的相反表面,用于基本上反射以第一角度范围内的角度照射在反射器组件上的光线,并且基本上透射照射在反射器组件上的多色光线中的 在第二角度范围内的角度。 在本发明的一些实施例中,输入光学元件和输出光学元件是具有周期性轮廓的衍射光栅,所述周期性轮廓成形为使得光的至少一部分主导地耦合成满足| m | > 1。
    • 6. 发明申请
    • OPTICAL DEVICE FOR RELAYING POLYCHROMATIC LIGHT
    • 用于中继聚光灯的光学装置
    • WO2009083977A2
    • 2009-07-09
    • PCT/IL2008/001691
    • 2008-12-29
    • MIRAGE INNOVATIONS LTD.REINHORN, SilviuCOHEN, YoramELDAR, AmiramITZKOVITCH, Moti
    • REINHORN, SilviuCOHEN, YoramELDAR, AmiramITZKOVITCH, Moti
    • G02B27/01
    • G02B6/0035G02B5/18G02B6/0016G02B6/0038G02B27/0172G02B2027/0116G02B2027/0123G02B2027/0136G02B2027/0174
    • An optical relay device, for relaying polychromatic light is disclosed. The device comprises: an input optical element formed in a planar substrate for receiving and redirecting the light for propagation of the light in a lateral direction within the substrate; and an output optical element formed in the substrate for receiving light propagating within the substrate and coupling the light out of the substrate. The device further comprises a reflector assembly at least partially coating opposite surfaces of the substrate for substantially reflecting light rays impinging on the reflector assembly at an angle within a first angular range, and substantially transmitting light rays of the polychromatic light impinging on the reflector assembly at an angle within a second angular range. In some embodiments of the present invention the input optical element and the output optical element are diffraction gratings having a periodic profile shaped such that at least one portion of the light is dominantly coupled into a diffraction order m satisfying |m| > 1.
    • 公开了用于中继多色光的光学继电器装置。 该装置包括:形成在平面基板中的输入光学元件,用于接收和重定向光以在基板内沿横向方向传播光; 以及输出光学元件,形成在所述基板中,用于接收在所述基板内传播的光并将所述光耦合到所述基板之外。 该装置还包括至少部分地涂覆基板的相对表面的反射器组件,用于基本上反射以第一角度范围内的角度撞击在反射器组件上的光线,并基本上透射入射在反射器组件上的多色光的光线 在第二角度范围内的角度。 在本发明的一些实施例中,输入光学元件和输出光学元件是衍射光栅,其具有定形的周期轮廓,使得至少一部分光主要耦合到满足| m | > 1。
    • 7. 发明申请
    • WAFER INSPECTION SYSTEM
    • 波浪检测系统
    • WO2006002150A1
    • 2006-01-05
    • PCT/US2005/021900
    • 2005-06-20
    • APPLIED MATERIALS ISRAEL, LTD.REINHORN, SilviuSOME, DanielALMOGY, Gilad
    • REINHORN, SilviuSOME, DanielALMOGY, Gilad
    • G01N21/17
    • G01N21/9501G01N21/1717
    • Apparatus for inspecting a surface, including a plurality of pump sources having respective pump optical output ends and providing respective pump beams through the pump optical output ends, and a plurality of probe sources having respective probe optical output ends and providing respective probe beams through the probe optical output ends. There is an alignment mounting which holds the respective pump optical output ends and probe optical output ends in equal respective effective spatial offsets, and optics which convey the respective pump beams and probe beams to the surface, so as to generate returning radiation from a plurality of respective locations thereon, and which convey the returning radiation from the respective locations. The apparatus includes a receiving unit which is adapted to receive the returning radiation and which is adapted to determine a characteristic of the respective locations in response thereto.
    • 用于检查表面的装置,包括具有相应的泵浦光学输出端的多个泵浦源,并且通过泵浦光学输出端提供相应的泵浦光束,以及具有相应的探测光学输出端的多个探测源,并且通过探针提供相应的探测光束 光输出端。 存在对准安装,其将相应的泵浦光学输出端和探测光学输出端保持在相等的有效空间偏移中;以及光学器件,其将相应的泵浦光束和探测光束传送到表面,以便产生来自多个 各自的位置,并且从各个位置传送返回的辐射。 该装置包括接收单元,该接收单元适于接收返回的辐射并且适于响应于此确定相应位置的特性。
    • 8. 发明申请
    • VIEWFINDER FOR VIDEO CAMERA
    • 视频摄像机的视频
    • WO1996029819A1
    • 1996-09-26
    • PCT/US1996004074
    • 1996-03-21
    • YEDA RESEARCH AND DEVELOPMENT CO. LTD.REINHORN, SilviuFRIESEM, AsherLEIBOVITZ, DavidSHARON, Benjamin
    • YEDA RESEARCH AND DEVELOPMENT CO. LTD.
    • H04N05/222
    • H04N5/23212H04N5/2251
    • There is provided an attachment for a camera (C) with a viewfinder for viewing the object to be filmed, having a housing including a device for the attachment thereof to the camera, a first reflector (8) accommodated in the housing and adapted to deflect the optical axis determined by the viewfinder by a predetermined angle, a positive lens (2) slidably and adjustably mounted in a tube (16) mounted on the housing in optical alignment with the optical axis as deflected by the first reflector, and a second, partial reflector (10) mounted above the tube (16) and adapted to deflect the optical axis, as emerging from the positive lens, toward a user of said camera. The optical parameters of the lens are such that the optical path length between the image produced by the viewfinder and the lens is equal to, or smaller than, the focal length of the lens, which lens thereby produces a virtual image of the viewfinder image, the position of which virtual image can be made to substantially coincide with the position of the object (6).
    • 提供了一种用于具有用于观察被拍摄对象的取景器的相机(C)的附件,具有包括用于将其附接到相机的装置的壳体,容纳在壳体中并适于偏转的第一反射器(8) 所述光轴由所述取景器确定预定角度;正透镜(2),其可滑动地和可调节地安装在安装在所述壳体上的与所述第一反射器偏转的光轴对准的管中;以及第二, 部分反射器(10)安装在管(16)上方并且适于使从正透镜出射的光轴朝向所述照相机的使用者偏转。 透镜的光学参数使得由取景器和透镜产生的图像之间的光程长度等于或小于透镜的焦距,该透镜从而产生取景器图像的虚像, 可以使虚拟图像的位置基本上与物体(6)的位置一致。