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1. 发明申请

WO2005020262A1 ELECTROSTATICALLY DRIVEN LATCHABLE ACTUATOR SYSTEM 审中-公开
标题翻译：静电驱动控制执行器系统
公开(公告)号：WO2005020262A1
公开(公告)日：2005-03-03
申请号：PCT/JP2004/012662
申请日：2004-08-25
申请人： MATSUSHITA ELECTRIC WORKS, LTD. , HARADA, Hiroshi , OKA, Naomasa , SUZUKI, Yuji , FUKSHIMA, Hiroshi , NOGE, Hiroshi , OGIHARA, Jun , KAWANO, Kiyohiko
发明人： HARADA, Hiroshi , OKA, Naomasa , SUZUKI, Yuji , FUKSHIMA, Hiroshi , NOGE, Hiroshi , OGIHARA, Jun , KAWANO, Kiyohiko
IPC分类号： H01H59/00
CPC分类号： G02B6/358 , G02B6/3512 , G02B6/355 , G02B6/357 , G02B6/3584 , G02B6/3596 , G02B26/02 , H01H59/0009 , H01H2001/0047
摘要： An electrostatically driven latchable actuator system has an actuator and a pair of side effectors on opposite ends of the actuator. The actuator is resiliently supported to a substrate and is movable along a linear axis between two operative positions as being electrically attracted to one of the side effectors. A latch mechanism is provided to mechanically latch the actuator at either of the operative positions. The side effectors are movably towards and away from the actuator along the linear axis between a normal position and a shifted position close to the actuator. Both of the side effectors are also resiliently supported to the substrate to be movable towards the actuator by being electrostatically attracted thereto and away from the actuator by resiliency. The moving side effector is interlocked to the latch mechanism through a mechanical link so as to unlatch the actuator in response to one of the side effectors being attracted to the actuator, and allow the actuator to move from one operative position to the other operative position to be again latched thereat.
摘要翻译：静电驱动的可闩锁致动器系统在致动器的相对端具有致动器和一对副作用器。致动器被弹性地支撑到基板，并且可以沿着线性轴线在两个操作位置之间移动，从而被电吸引到一个副作用器。提供闩锁机构以在执行位置的任一位置机械地闩锁致动器。副作用器可沿着线性轴线在致动器之间朝向和远离致动器移动，在正常位置和靠近致动器的移位位置之间。两个副作用器也被弹性地支撑到基板上，以通过静电吸引到致动器并且通过弹性远离致动器而朝向致动器移动。运动侧执行器通过机械连杆与闩锁机构互锁，以响应于一个副作用器被吸引到致动器而解锁致动器，并允许致动器从一个操作位置移动到另一操作位置，再次被锁在那里。

2. 发明申请

WO2005028359A1 PROCESS FOR FABRICATING A MICRO-ELECTRO-MECHANICAL SYSTEM WITH MOVABLE COMPONENTS 审中-公开
标题翻译：用于制造具有可移动部件的微电子机械系统的方法
公开(公告)号：WO2005028359A1
公开(公告)日：2005-03-31
申请号：PCT/JP2004/014142
申请日：2004-09-21
申请人： MATSUSHITA ELECTRIC WORKS, LTD. , OKA, Naomasa , HARADA, Hiroshi , OGIHARA, Jun , FUKSHIMA, Hiroshi , NOGE, Hiroshi , SUZUKI, Yuji , KAWANO, Kiyohiko , YOSHIHARA, Takaaki , SUZUMURA, Masahiko
发明人： OKA, Naomasa , HARADA, Hiroshi , OGIHARA, Jun , FUKSHIMA, Hiroshi , NOGE, Hiroshi , SUZUKI, Yuji , KAWANO, Kiyohiko , YOSHIHARA, Takaaki , SUZUMURA, Masahiko
IPC分类号： B81B3/00
CPC分类号： G02B26/0816 , B81B3/0086 , B81B2201/033 , B81B2201/045 , B81C1/00484 , B81C2201/0109 , B81C2201/019 , G02B6/3516 , G02B6/3518 , G02B6/3546 , G02B6/355 , G02B6/357 , G02B6/3584 , H02N1/008
摘要： A process for fabricating a micro-electro-mechanical system (MEMS) composed of fixed components fixedly supported on a lower substrate and movable components movably supported on the lower substrate. The process utilizes an upper substrate separate from the lower substrate. The upper substrate is selectively etched in its top layer to form therein a plurality of posts which project commonly from a bottom layer of the upper substrate. The posts include the fixed components to be fixed to the lower substrate and the movable components which are resiliently supported only to one or more of the fixed components to be movable relative to the fixed components. The lower substrate is formed in its top surface with at least one recess. The upper substrate is then bonded to the top of the lower substrate upside down in such a manner as to place the fixed components directly on the lower substrate and to place the movable components upwardly of the recess. Finally, the bottom layer of the upper substrate is removed to release the movable components from the bottom layer for floating the movable components above the recess and allowing them to move relative to the lower substrate, while keeping the fixed components fixed to the top of the lower substrate.
摘要翻译：一种用于制造由固定地支撑在下基板上的固定部件和可移动地支撑在下基板上的可移动部件的微电子机械系统（MEMS）的制造方法。该方法利用与下基板分开的上基板。在其顶层中选择性地蚀刻上基板，以在其中形成多个从上基板的底层共同突出的柱。支柱包括要固定到下基板的固定部件和仅弹性地支撑到一个或多个固定部件以相对于固定部件可移动的可动部件。下基板在其顶表面上形成有至少一个凹部。然后将上基板以这样的方式上下连接到下基板的顶部，以将固定部件直接放置在下基板上并将可移动部件放置在凹部的上方。最后，去除上基板的底层以从底层释放可移动部件，用于使可移动部件浮动在凹部上方并允许它们相对于下基板移动，同时保持固定部件固定在下基板。

3. 发明申请

WO1998037425A1 ACCELERATION SENSOR ELEMENT AND METHOD OF ITS MANUFACTURE 审中-公开
标题翻译：加速传感器元件及其制造方法
公开(公告)号：WO1998037425A1
公开(公告)日：1998-08-27
申请号：PCT/JP1997003811
申请日：1997-10-22
申请人： MATSUSHITA ELECTRIC WORKS, LTD. , YOSHIDA, Hitoshi , TOMONARI, Shigeaki , OKA, Naomasa , NAKAMURA, Takuro , ISHIDA, Takuro , KAMAKURA, Masanao , KASANO, Fumihiro
发明人： MATSUSHITA ELECTRIC WORKS, LTD.
IPC分类号： G01P15/08
CPC分类号： G01P15/123 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/084 , G01P2015/0842
摘要： A flexure transducer which is used for the detection of an applied acceleration comprising (1) a frame having an upper surface and a lower surface, (2) a sheet member which has a plurality of flexible parts and a center part and whose flexible parts are extended between at least a part of the inner edge of the frame and the center part and are integrally continuous with them, (3) a weight which has a neck part integrally connected to the center part of the sheet member and is hung from the sheet member through the neck part and (4) a support member which supports the lower surface of the frame and whose inner surface faces the side surface of the weight with a first gap therebetween, a second gap being continuous with the first gap, and defined between the flexible parts of the sheet member and the weight, a third gap being defined between the frame and the sheet member and/or inside the sheet member, the frame and the sheet member being joined to each other and the sheet member and the weight being joined to each other in such a manner that, when an acceleration is applied to the transducer, at least two flexible parts are elastically deformed and, as a result, the weight is displaced relatively to the frame, the weight and the support member being formed of a semiconductor substrate, the 2nd gap being formed by removing a sacrifice layer which is provided in the semiconductor substrate and the frame and the sheet member comprising epitaxial layers provided on the semiconductor substrate.
摘要翻译：一种用于检测施加加速度的弯曲换能器，包括：（1）具有上表面和下表面的框架，（2）片材，其具有多个柔性部分和中心部分，并且其柔性部分是在框架的内边缘的至少一部分与中心部分之间延伸并且与它们一体连续，（3）重物，该重物具有与片状构件的中心部分一体地连接并从该片材悬挂的颈部构件通过颈部和（4）支撑构件，其支撑框架的下表面并且其内表面面对重物的侧表面，其间具有第一间隙，第二间隙与第一间隙连续，并且定义在片状部件的柔性部分和重物，第三间隙限定在框架和片状部件之间和/或片材部件的内部，框架和片状部件彼此接合并且片状部件和第 e重物彼此接合，使得当对换能器施加加速度时，至少两个柔性部分弹性变形，结果，重量相对于框架移动，重量和支撑件构件由半导体衬底形成，所述第二间隙通过去除设置在所述半导体衬底中的牺牲层和所述框架以及所述片构件包括设置在所述半导体衬底上的外延层而形成。

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