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1. 发明申请

WO2012112989A1 FLOATING OPTICAL SENSOR MOUNT 审中-公开
标题翻译：浮动光学传感器安装
公开(公告)号：WO2012112989A1
公开(公告)日：2012-08-23
申请号：PCT/US2012/025879
申请日：2012-02-21
申请人： PARKER-HANNIFIN CORPORATION , HARTZELL, John , CIRILLO, James , HROMYAK, Dustin , NGUYEN, Hung phi , CROWLEY, David, B. , LAURICH, Michael A.
发明人： HARTZELL, John , CIRILLO, James , HROMYAK, Dustin , NGUYEN, Hung phi , CROWLEY, David, B. , LAURICH, Michael A.
IPC分类号： F15B15/28
CPC分类号： F15B15/00 , F15B15/2846 , F15B15/2892 , G01D11/30 , Y10T29/49002
摘要： A piston-cylinder actuator (20) includes a unique mount (36) for an absolute-position sensor (30). The mount (36) is made from a bearing material provides a flexible connection between the sensor mount (36) and the cylinder housing (40). This flexible connection allows the piston rod (32) to deflect naturally, under its own weight or under other laterally-directed forces, while maintaining the distance and perpendicularity between the sensor (30) and the rod surface (34), within acceptable limits. The sensor mount (36) is made from a bearing material that will allow it to float directly on the rod surface (34) without scuffing or otherwise damaging the rod surface (34), particularly the markings or other indicia on that surface (34). Due to the flexible connection between the sensor mount (36) and the cylinder housing (40), the proper distance between the sensor (30) and the rod surface (34) can be maintained at all times.
摘要翻译：活塞气缸致动器（20）包括用于绝对位置传感器（30）的唯一安装件（36）。安装件（36）由轴承材料制成，在传感器支架（36）和气缸壳体（40）之间提供柔性连接。这种柔性连接允许活塞杆（32）在其自身重量下或在其它侧向力下自然偏转，同时保持传感器（30）和杆表面（34）之间的距离和垂直度在可接受的限度内。传感器支架（36）由轴承材料制成，该轴承材料将允许其直接浮在杆表面（34）上，而不会刮擦或以其他方式损伤杆表面（34），特别是该表面（34）上的标记或其他标记，。由于传感器支架（36）和气缸壳体（40）之间的柔性连接，可以始终保持传感器（30）和杆表面（34）之间的适当距离。

2. 发明申请

WO2012012265A2 3D MICROSCOPE AND METHODS OF MEASURING PATTERNED SUBSTRATES 审中-公开
标题翻译： 3D显微镜和测量图形基板的方法
公开(公告)号：WO2012012265A2
公开(公告)日：2012-01-26
申请号：PCT/US2011/044045
申请日：2011-07-14
申请人： ZETA INSTRUMENTS, INC. , HOU, Zhen , XU, James Jianguo , LEE, Ken Kinsun , STAINTON, James Nelson , NGUYEN, Hung Phi , KUDINAR, Rusmin , SOETARMAN, Ronny
发明人： HOU, Zhen , XU, James Jianguo , LEE, Ken Kinsun , STAINTON, James Nelson , NGUYEN, Hung Phi , KUDINAR, Rusmin , SOETARMAN, Ronny
IPC分类号： H04N13/02 , H04N7/18
CPC分类号： G02B21/006 , G01N21/9501 , G01N21/956 , G01N2021/0168 , G02B21/0016 , G02B21/0028 , G02B21/0032 , G02B21/367 , G06T7/60 , G06T2207/10056 , G06T2207/10152 , G06T2207/20068 , G06T2207/30148
摘要： A three-dimensional (3D) microscope for patterned substrate measurement can include an objective lens, a reflected illuminator, a transmitted illuminator, a focusing adjustment device, an optical sensor, and a processor. The focusing adjustment device can automatically adjust the objective lens focus at a plurality of Z steps. The optical sensor can be capable of acquiring images at each of these Z steps. The processor can control the reflected illuminator, the transmitted illuminator, the focusing adjustment device, and the optical sensor. The processor can be configured to capture first and second images at multiple Z steps, the first image with the pattern using the reflected illuminator and the second image without the pattern using one of the reflected illuminator and the transmitted illuminator.
摘要翻译：用于图案化衬底测量的三维（3D）显微镜可以包括物镜，反射照明器，透射照明器，聚焦调节装置，光学传感器和处理器。聚焦调节装置可以在多个Z步骤自动调节物镜焦点。光学传感器能够在这些Z步骤的每个步骤中获取图像。处理器可以控制反射照明器，透射照明器，聚焦调节装置和光学传感器。处理器可以被配置成以多个Z步骤捕获第一和第二图像，第一图像使用反射照明器的图案，而不使用反射照明器和透射照明器之一的图案的第二图像。

3. 发明申请

WO2012112994A1 OPTICAL SENSOR AND MOUNTING INTERFACE 审中-公开
标题翻译：光传感器和安装界面
公开(公告)号：WO2012112994A1
公开(公告)日：2012-08-23
申请号：PCT/US2012/025979
申请日：2012-02-21
申请人： PARKER-HANNIFIN CORPORATION , BINA, David , CIRILLO, James , DAUBENSPECK, Laird , NGUYEN, Hung phi
发明人： BINA, David , CIRILLO, James , DAUBENSPECK, Laird , NGUYEN, Hung phi
IPC分类号： G01D11/24 , G01D5/26
CPC分类号： G01J1/0271 , G01D5/26 , G01D5/268 , G01D11/245 , Y10T29/49124
摘要： A sensor (30) includes an enclosure (42) having a housing (44) and a lower cassette (46) that cooperate to provide a sealed volume in which an optical sensor assembly (50) is enclosed and protected. The optical sensor assembly (50) includes a circuit board (52) mounted in the housing (44). The circuit board (52) includes a light source (54) and a light detector (56). The sensor assembly (50) further includes a light pipe (60) that guides light from the sensor (30) onto a target and a lens (62) guides reflected light from the target onto the light detector (56). Lower ends of the light pipe and the lens are supported by a recess (102) in the lower cassette (46). Upper ends of the light pipe (60) and the lens (62) are supported by an upper cassette (64). The upper cassette (64) is positively located and mounted to the circuit board (52) and received in an internal receptacle (100) in the lower cassette (46).
摘要翻译：传感器（30）包括具有壳体（44）和下部盒（46）的壳体（42），所述壳体协作以提供封闭和保护光学传感器组件（50）的密封容积。光学传感器组件（50）包括安装在壳体（44）中的电路板（52）。电路板（52）包括光源（54）和光检测器（56）。传感器组件（50）还包括将来自传感器（30）的光引导到目标上的光管（60），并且透镜（62）将来自目标的反射光引导到光检测器（56）上。光管和透镜的下端由下盒（46）中的凹部（102）支撑。光管（60）和透镜（62）的上端由上部盒（64）支撑。上盒（64）被正确地定位并且安装到电路板（52）并且被接收在下盒（46）中的内部容器（100）中。

4. 发明申请

WO2012094175A2 3D MICROSCOPE INCLUDING INSERTABLE COMPONENTS TO PROVIDE MULTIPLE IMAGING AND MEASUREMENT CAPABILITIES 审中-公开
标题翻译： 3D显微镜，包括提供多种成像和测量能力的绝对组件
公开(公告)号：WO2012094175A2
公开(公告)日：2012-07-12
申请号：PCT/US2011/067044
申请日：2011-12-22
申请人： ZETA INSTRUMENTS, INC. , XU, James Jianguo , LEE, Ken Kinsun , KUDINAR, Rusmin , SOETARMAN, Ronny , NGUYEN, Hung Phi , HOU, Zhen
发明人： XU, James Jianguo , LEE, Ken Kinsun , KUDINAR, Rusmin , SOETARMAN, Ronny , NGUYEN, Hung Phi , HOU, Zhen
IPC分类号： H04N13/02 , G02B21/06
CPC分类号： G02B21/06 , G02B21/0092 , G02B21/367
摘要： A three-dimensional (3D) microscope includes various insertable components that facilitate multiple imaging and measurement capabilities. These capabilities include Nomarski imaging, polarized light imaging, quantitative differential interference contrast (q-DIC) imaging, motorized polarized light imaging, phase-shifting interferometry (PSI), and vertical-scanning interferometry (VSI).
摘要翻译：三维（3D）显微镜包括各种可插入的部件，便于多个成像和测量功能。这些功能包括Nomarski成像，偏振光成像，定量微分干涉对比度（q-DIC）成像，电动偏振光成像，移相干涉测量（PSI）和垂直扫描干涉测量（VSI）。

5. 发明申请

WO2012012265A3 3D MICROSCOPE AND METHODS OF MEASURING PATTERNED SUBSTRATES 审中-公开
标题翻译： 3D显微镜和测量图形基板的方法
公开(公告)号：WO2012012265A3
公开(公告)日：2014-03-27
申请号：PCT/US2011044045
申请日：2011-07-14
申请人： ZETA INSTR INC , HOU ZHEN , XU JAMES JIANGUO , LEE KEN KINSUN , STAINTON JAMES NELSON , NGUYEN HUNG PHI , KUDINAR RUSMIN , SOETARMAN RONNY
发明人： HOU ZHEN , XU JAMES JIANGUO , LEE KEN KINSUN , STAINTON JAMES NELSON , NGUYEN HUNG PHI , KUDINAR RUSMIN , SOETARMAN RONNY
IPC分类号： G02B21/00
CPC分类号： G02B21/006 , G01N21/9501 , G01N21/956 , G01N2021/0168 , G02B21/0016 , G02B21/0028 , G02B21/0032 , G02B21/367 , G06T7/60 , G06T2207/10056 , G06T2207/10152 , G06T2207/20068 , G06T2207/30148
摘要： A three-dimensional (3D) microscope for patterned substrate measurement can include an objective lens, a reflected illuminator, a transmitted illuminator, a focusing adjustment device, an optical sensor, and a processor. The focusing adjustment device can automatically adjust the objective lens focus at a plurality of Z steps. The optical sensor can be capable of acquiring images at each of these Z steps. The processor can control the reflected illuminator, the transmitted illuminator, the focusing adjustment device, and the optical sensor. The processor can be configured to capture first and second images at multiple Z steps, the first image with the pattern using the reflected illuminator and the second image without the pattern using one of the reflected illuminator and the transmitted illuminator.
摘要翻译：用于图案化衬底测量的三维（3D）显微镜可以包括物镜，反射照明器，透射照明器，聚焦调节装置，光学传感器和处理器。聚焦调节装置可以在多个Z步骤自动调节物镜焦点。光学传感器能够在这些Z步骤的每个步骤中获取图像。处理器可以控制反射照明器，透射照明器，聚焦调节装置和光学传感器。处理器可以被配置成以多个Z步骤捕获第一和第二图像，第一图像使用反射照明器的图案，而不使用反射照明器和透射照明器之一的图案的第二图像。

6. 发明申请

WO2012094175A3 3D MICROSCOPE INCLUDING INSERTABLE COMPONENTS TO PROVIDE MULTIPLE IMAGING AND MEASUREMENT CAPABILITIES 审中-公开
标题翻译： 3D显微镜，包括可插入组件以提供多种成像和测量功能
公开(公告)号：WO2012094175A3
公开(公告)日：2012-08-23
申请号：PCT/US2011067044
申请日：2011-12-22
申请人： ZETA INSTR INC , XU JAMES JIANGUO , LEE KEN KINSUN , KUDINAR RUSMIN , SOETARMAN RONNY , NGUYEN HUNG PHI , HOU ZHEN
发明人： XU JAMES JIANGUO , LEE KEN KINSUN , KUDINAR RUSMIN , SOETARMAN RONNY , NGUYEN HUNG PHI , HOU ZHEN
IPC分类号： G02B21/18
CPC分类号： G02B21/06 , G02B21/0092 , G02B21/367
摘要： A three-dimensional (3D) microscope includes various insertable components that facilitate multiple imaging and measurement capabilities. These capabilities include Nomarski imaging, polarized light imaging, quantitative differential interference contrast (q-DIC) imaging, motorized polarized light imaging, phase-shifting interferometry (PSI), and vertical-scanning interferometry (VSI).
摘要翻译：三维（3D）显微镜包括各种可插入的部件，有助于多种成像和测量功能。这些功能包括Nomarski成像，偏振光成像，定量微分干涉对比（q-DIC）成像，机动偏振光成像，相移干涉测量（PSI）和垂直扫描干涉测量（VSI）。

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