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1. 发明公开

EP1119738A4 SYSTEM AND METHOD FOR THREE-DIMENSIONAL INSPECTION USING PATTERNED LIGHT PROJECTION 审中-公开
标题翻译：装置和方法用于三维用于测试由投影图案光
公开(公告)号：EP1119738A4
公开(公告)日：2002-09-18
申请号：EP99928436
申请日：1999-06-07
申请人： ACUITY IMAGING LLC , HALLERMAN GREGORY R , LUDLOW JONATHAN E , STERN HOWARD K
发明人： HALLERMAN GREGORY R , LUDLOW JONATHAN E , STERN HOWARD K
IPC分类号： G01N21/88 , G01B11/24 , G01B11/25
CPC分类号： G01N21/88 , G01N21/8806
摘要： An inspection system (10) is used to obtain three-dimensional information pertaining to an article (12) having elements with specular surfaces, such as the solder balls on a BGA device. The system includes patterned light projector (20) which projects a pattern at an oblique angle ( alpha ) with respect to the plane of the article (12) and an image detector (24) disposed generally above the article (12). The light projector (20) includes an extended light source (30) and a light patterning member (32) disposed such that the light pattern is in focus in an image plane parallel to the plane of the article (12), satisfying the Scheimpflug condition. The spacing of the lines is preferably greater than a spacing or pitch of the specular elements. An image processor (26) is coupled to the image detector (24) to receive the image and measure the lateral shift of the lines to determine height information using triangulation.

2. 发明公开

EP1119738A2 SYSTEM AND METHOD FOR THREE-DIMENSIONAL INSPECTION USING PATTERNED LIGHT PROJECTION 审中-公开
标题翻译：装置和方法用于三维用于测试由投影图案光
公开(公告)号：EP1119738A2
公开(公告)日：2001-08-01
申请号：EP99928436.7
申请日：1999-06-07
申请人： Acuity Imaging, LLC , Hallerman, Gregory R. , Ludlow, Jonathan E. , Stern, Howard K.
发明人： HALLERMAN, Gregory, R. , LUDLOW, Jonathan, E. , STERN, Howard, K.
IPC分类号： G01B11/24
CPC分类号： G01N21/88 , G01N21/8806
摘要： An inspection system (10) is used to obtain three-dimensional information pertaining to an article (12) having elements with specular surfaces, such as the solder balls on a BGA device. The system includes patterned light projector (20) which projects a pattern at an oblique angle (α) with respect to the plane of the article (12) and an image detector (24) disposed generally above the article (12). The light projector (20) includes an extended light source (30) and a light patterning member (32) disposed such that the light pattern is in focus in an image plane parallel to the plane of the article (12), satisfying the Scheimpflug condition. The spacing of the lines is preferably greater than a spacing or pitch of the specular elements. An image processor (26) is coupled to the image detector (24) to receive the image and measure the lateral shift of the lines to determine height information using triangulation.

3. 发明申请

WO0016071A8 SYSTEM AND METHOD FOR THREE-DIMENSIONAL INSPECTION USING PATTERNED LIGHT PROJECTION 审中-公开
标题翻译：用于使用图案化光投影进行三维检测的系统和方法
公开(公告)号：WO0016071A8
公开(公告)日：2000-06-15
申请号：PCT/US9912706
申请日：1999-06-07
申请人： ACUITY IMAGING LLC , HALLERMAN GREGORY R , LUDLOW JONATHAN E , STERN HOWARD K
发明人： HALLERMAN GREGORY R , LUDLOW JONATHAN E , STERN HOWARD K
IPC分类号： G01N21/88 , G01B11/24
CPC分类号： G01N21/88 , G01N21/8806
摘要： An inspection system (10) is used to obtain three-dimensional information pertaining to an article (12) having elements with specular surfaces, such as the solder balls on a BGA device. The system includes patterned light projector (20) which projects a pattern at an oblique angle ( alpha ) with respect to the plane of the article (12) and an image detector (24) disposed generally above the article (12). The light projector (20) includes an extended light source (30) and a light patterning member (32) disposed such that the light pattern is in focus in an image plane parallel to the plane of the article (12), satisfying the Scheimpflug condition. The spacing of the lines is preferably greater than a spacing or pitch of the specular elements. An image processor (26) is coupled to the image detector (24) to receive the image and measure the lateral shift of the lines to determine height information using triangulation.
摘要翻译：使用检查系统（10）来获得与具有镜面的元件（例如BGA装置上的焊球）的物品（12）有关的三维信息。该系统包括图案化的光投射器（20）和图像检测器（24），图案化的光投射器（20）相对于物品（12）的平面以倾斜角度（α）投影图案，图像检测器（24）大致设置在物品（12）上方。光投射器（20）包括延伸光源（30）和光构图构件（32），光构图构件（32）布置成使得光图案在与物品（12）的平面平行的图像平面内聚焦，满足Scheimpflug条件。线的间距优选地大于镜面元件的间距或间距。图像处理器（26）耦合到图像检测器（24）以接收图像并测量线的横向偏移以使用三角测量来确定高度信息。

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