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1. 发明申请

US20130061926A1 SOLAR CELL ELEMENT AND METHOD FOR PRODUCING THE SAME, AND SOLAR CELL MODULE 审中-公开
标题翻译：太阳能电池元件及其制造方法以及太阳能电池模块
公开(公告)号：US20130061926A1
公开(公告)日：2013-03-14
申请号：US13699290
申请日：2011-05-20
申请人： Manabu Komoda , Kazuaki Iwameji , Kazuyoshi Fujimoto
发明人： Manabu Komoda , Kazuaki Iwameji , Kazuyoshi Fujimoto
IPC分类号： H01L31/0264 , H01L31/18
CPC分类号： H01L31/02167 , H01L31/068 , H01L31/1804 , H01L31/1868 , Y02E10/547 , Y02P70/521
摘要： Provided is a solar cell element comprising a semiconductor substrate which has a p-type semiconductor region, wherein one or more surface layer-internal regions which have Si—O bonds are formed in the surface layer part of the p-type semiconductor region and a passivation layer is formed on the surface layer-internal regions. Also provided is a solar cell module comprising the solar cell element. A method for producing a solar cell element is further provided, said method comprising: a substrate preparation step for preparing a semiconductor substrate which has a p-type semiconductor region; a surface treatment step for exposing the surface of the p-type semiconductor region to plasma produced using an oxygen-containing gas, and forming surface layer-internal regions which have Si—O bonds in the surface layer part of the p-type semiconductor region; and a layer formation process for forming a passivation layer on the surface layer-internal regions.
摘要翻译：提供一种太阳能电池元件，其包括具有p型半导体区域的半导体衬底，其中在p型半导体区域的表面层部分中形成有具有Si-O键的一个或多个表面层 - 内部区域，钝化层形成在表层 - 内部区域上。还提供了包括太阳能电池元件的太阳能电池模块。还提供一种制造太阳能电池元件的方法，所述方法包括：制备具有p型半导体区域的半导体衬底的衬底制备步骤; 用于将p型半导体区域的表面暴露于使用含氧气体产生的等离子体的表面处理步骤，以及在p型半导体区域的表层部分形成具有Si-O键的表面层 - 内部区域 ; 以及用于在表面层内部区域上形成钝化层的层形成工艺。

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