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    • 3. 发明授权
    • Method for determining the cleanliness of a surface
    • 确定表面清洁度的方法
    • US5756885A
    • 1998-05-26
    • US628048
    • 1996-04-04
    • Isaac T. PokuRama Cherkur
    • Isaac T. PokuRama Cherkur
    • G01N13/02
    • G01N13/02G01N2013/0241
    • A method for determining the cleanliness of a surface of a substrate involves using a visual pattern (17, 29). The visual pattern is either provided in the optical portion of a visual system or is formed on the surface of the substrate to be analyzed. A liquid droplet (26, 27) is dispensed onto the substrate surface, and the extent of the spread area of the droplet is compared to the visual pattern. If the area of the droplet is greater than or equal to a tolerance as signified by the pattern markings, then the surface of the substrate is determined to be sufficiently clean. In relying upon a simple visual comparison of the area of the surface covered by the droplet with an empirically determined visual pattern, a method for analyzing surface cleanliness is consistent between operators and surfaces, is easy to set up and operate, and improves manufacturing throughput.
    • 用于确定基材表面的清洁度的方法包括使用视觉图案(17,29)。 视觉图案被提供在视觉系统的光学部分中,或者形成在待分析的基板的表面上。 将液滴(26,27)分配到基板表面上,并将液滴的扩展区域的程度与视觉图案进行比较。 如果液滴的面积大于或等于由图案标记表示的公差,则确定基底的表面足够清洁。 在凭借经验确定的视觉图案来依靠对液滴覆盖的表面的简单视觉比较,分析表面清洁度的方法在操作者和表面之间是一致的,易于建立和操作,并且提高了生产量。 \!