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    • 2. 发明授权
    • Method of controlling semiconductor fabricating equipment to process wafers of a single lot individually
    • 控制半导体制造设备以单独处理单个批次的晶片的方法
    • US06192291B1
    • 2001-02-20
    • US09168093
    • 1998-10-08
    • Dae-hong Kwon
    • Dae-hong Kwon
    • G06F1900
    • H01L21/67276G05B19/4183G05B2219/31428Y02P90/10Y02P90/18Y02P90/22
    • A module of a host computer of a semiconductor fabrication management system receives from an operator a plurality of IDs assigned by the operator to each of the wafers, respectively, received in the slots of a wafer cassette. The module searches a database of the host computer to correlate each received wafer ID with a process step ID, and the process step ID with a process program ID (PPID). Process condition data is formulated from the correlated process step IDs and PPIDs. At this point, the semiconductor fabrication management system is used to determine whether the operator has inputted a track-in signal to the system. If the track-in signal has been inputted, the processing condition data is downloaded to a server of the semiconductor processing equipment. The downloaded process condition data is used to change, if necessary, an equipment control message stored in the server. The equipment control message is then downloaded to the semiconductor processing equipment to control the semiconductor processing equipment to process the wafers individually as called for by their respective process step IDs and PPIDs. Accordingly, the wafers of even a single lot can be processed individually under conditions specified for that particular wafer as called for by their process step IDs and PPIDs.
    • 半导体制造管理系统的主计算机的模块从操作者接收分配给晶片盒的槽中的每个晶片的多个ID。 模块搜索主计算机的数据库以使每个接收到的晶片ID与处理步骤ID相关联,并且处理步骤ID具有处理程序ID(PPID)。 过程条件数据由相关的流程步骤ID和PPID制定。 此时,半导体制造管理系统用于确定操作者是否向系统输入了一个跟踪信号。 如果输入了输入信号,则将处理条件数据下载到半导体处理设备的服务器。 下载的过程条件数据用于在必要时改变存储在服务器中的设备控制消息。 然后将设备控制消息下载到半导体处理设备,以控制半导体处理设备单独地处理晶片,如通过它们各自的工艺步骤ID和PPID所要求的那样。 因此,即使是单个批次的晶圆也可以在其工艺步骤ID和PPID所要求的条件下单独处理为特定晶片指定的条件。