发明申请
WO2023028821A1 MEMORY DEVICES HAVING VERTICAL TRANSISTORS AND METHODS FOR FORMING THEREOF
审中-公开
基本信息:
- 专利标题: MEMORY DEVICES HAVING VERTICAL TRANSISTORS AND METHODS FOR FORMING THEREOF
- 申请号:PCT/CN2021/115594 申请日:2021-08-31
- 公开(公告)号:WO2023028821A1 公开(公告)日:2023-03-09
- 发明人: ZHU, Hongbin , LIU, Wei , WANG, Yanhong
- 申请人: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- 申请人地址: No. 88 Weilai 3rd Road, East Lake High-Tech Development Zone
- 专利权人: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- 当前专利权人: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- 当前专利权人地址: No. 88 Weilai 3rd Road, East Lake High-Tech Development Zone
- 代理机构: NTD UNIVATION INTELLECTUAL PROPERTY AGENCY LTD.
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L27/11526 ; H01L27/11529
摘要:
In certain aspects, a three-dimensional (3D) memory device includes a first semiconductor structure, a second semiconductor structure, and a bonding interface between the first semiconductor structure and the second semiconductor structure. The first semiconductor structure includes a peripheral circuit. The second semiconductor structure includes an array of memory cells and a plurality of bit lines coupled to the memory cells and each extending in a second direction perpendicular to the first direction. Each of the memory cells includes a vertical transistor extending in a first direction, and a storage unit coupled to the vertical transistor. The vertical transistor includes a semiconductor body extending in the first direction, and a gate structure in contact with all sides of the semiconductor body. A respective one of the bit lines and a respective storage unit are coupled to opposite ends of each one of the memory cells in the first direction. The array of memory cells is coupled to the peripheral circuit across the bonding interface.
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L27/00 | 由在一个共用衬底内或其上形成的多个半导体或其他固态组件组成的器件 |
--------H01L27/02 | .包括有专门适用于整流、振荡、放大或切换的半导体组件并且至少有一个电位跃变势垒或者表面势垒的;包括至少有一个跃变势垒或者表面势垒的无源集成电路单元的 |
----------H01L27/04 | ..其衬底为半导体的 |
------------H01L27/06 | ...在非重复结构中包括有多个单个组件的 |
--------------H01L27/105 | ....包含场效应组件的 |
----------------H01L27/108 | .....动态随机存取存储结构的 |