基本信息:
- 专利标题： APPARATUS FOR CONDITIONING AND DIRECTING A RADIATION BEAM
- 申请号：PCT/EP2022/060588 申请日：2022-04-21
- 公开(公告)号：WO2022238091A1 公开(公告)日：2022-11-17
- 发明人： DER KINDEREN, Ronny , VAN SCHOOT, Jan, Bernard, Plechelmus , VAN SLUISVELD, Wouterus, Jozephus, Johannes
- 申请人： ASML NETHERLANDS B.V.
- 申请人地址： P.O. Box 324
- 专利权人： ASML NETHERLANDS B.V.
- 当前专利权人： ASML NETHERLANDS B.V.
- 当前专利权人地址： P.O. Box 324
- 代理机构： ASML NETHERLANDS B.V.
- 优先权： EP21173464.5 2021-05-12
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; G03F7/70133 ; G03F7/702 ; G03F7/70208 ; G03F7/70558 ; G03F7/7085
摘要：
An apparatus for conditioning and directing a radiation beam comprises: a first optical component; and an energy sensor. The first optical component comprises a two-dimensional array of independently movable reflective optical elements which is arranged to receive radiation from a radiation source. The two-dimensional array of independently movable reflective optical elements comprises: a first set configured to direct a first portion of received radiation to the energy sensor; and a second set configured to direct a second portion of received radiation to an illumination region. A number of reflective optical elements in the first set may be such that an energy of the first portion of radiation is less than 4% of the total energy of the first and second portions of radiation. The reflective optical elements in the first set of reflective optical elements may be distributed evenly over the first optical component.