基本信息:
- 专利标题: 薄膜晶体管、存储器及制作方法、电子设备
- 专利标题(英):THIN FILM TRANSISTOR, MEMORY AND MANUFACTURING METHOD, AND ELECTRONIC DEVICE
- 申请号:PCT/CN2021/131913 申请日:2021-11-19
- 公开(公告)号:WO2022160885A1 公开(公告)日:2022-08-04
- 发明人: 景蔚亮 , 黄凯亮 , 冯君校 , 王正波
- 申请人: 华为技术有限公司
- 申请人地址: 中国广东省深圳市龙岗区坂田华为总部办公楼, Guangdong 518129
- 专利权人: 华为技术有限公司
- 当前专利权人: 华为技术有限公司
- 当前专利权人地址: 中国广东省深圳市龙岗区坂田华为总部办公楼, Guangdong 518129
- 代理机构: 北京中博世达专利商标代理有限公司
- 优先权: CN202110106685.8 2021-01-26
- 主分类号: H01L51/05
- IPC分类号: H01L51/05 ; H01L51/40 ; H01L29/786
Embodiments of the present application relate to the technical field of memories, and provide a thin film transistor, a memory and a manufacturing method, and an electronic device, capable of reducing the size of the thin film transistor, improving area utilization, and reduce wiring difficulty. The thin film transistor comprises a gate electrode, a first electrode, a second electrode, a first dielectric layer, a second dielectric layer, and a semiconductor layer. The gate electrode comprises a gate substrate located at the top and a gate electrode column extending from the gate substrate to the bottom; the first electrode is located at the bottom; the second electrode is located between the first electrode and the gate substrate; the first dielectric layer is disposed between the second electrode and the first electrode, and is used for separating the first electrode from the second electrode; the second dielectric layer covers the surface of the gate substrate and the surface of the gate electrode column; the semiconductor layer is disposed along the side surface of the gate electrode column, and the second dielectric layer separates the semiconductor layer from the gate electrode. The first electrode and the second electrode are electrically connected to the semiconductor layer, respectively.