基本信息:
- 专利标题: IMPROVED FURNACE APPARATUS FOR CRYSTAL PRODUCTION
- 申请号:PCT/EP2021/082340 申请日:2021-11-19
- 公开(公告)号:WO2022106639A1 公开(公告)日:2022-05-27
- 发明人: CERAN, Kagan , MARSAN, Didier , SYRKIN, Alexander , BENAMARA, Omar , JEBARA, Moaine
- 申请人: ZADIENT TECHNOLOGIES SAS
- 申请人地址: 354 Voie Magellan
- 专利权人: ZADIENT TECHNOLOGIES SAS
- 当前专利权人: ZADIENT TECHNOLOGIES SAS
- 当前专利权人地址: 354 Voie Magellan
- 代理机构: KEHL, ASCHERL, LIEBHOFF & ETTMAYR
- 优先权: DE10 2020 215 755.3 2020-12-11
- 主分类号: C30B23/02
- IPC分类号: C30B23/02 ; C30B29/36 ; C30B35/00 ; H01L21/02 ; C30B23/00
摘要:
The present invention refers to a furnace apparatus (100), in particular a furnace apparatus (100) for growing crystals, in particular for growing SiC crystals. The furnace apparatus comprises a furnace unit (102), wherein the furnace unit (102) comprises a furnace housing (108) at least one crucible unit (106) wherein the crucible unit (106) is arranged inside the furnace housing (108), wherein the crucible unit (106) comprises a crucible housing (110), wherein the housing (110) has an outer surface (112) and an inner surface (114), wherein the inner surface (114) at least partially defines a crucible volume (116), wherein a receiving space (118) for receiving a source material (120) is arranged or formed inside the crucible volume (116), wherein a seed holder unit (122) for holding a defined seed wafer (18) is arranged inside the crucible volume (116), and at least one heating unit (124) for heating the source material (120), wherein the receiving space (118) for receiving the source material (120) is at least in parts arranged between the heating unit (124) and the seed holder unit (122).