发明申请
WO2022002519A1 METHOD FOR THERMO-MECHANICAL CONTROL OF A HEAT SENSITIVE ELEMENT AND DEVICE FOR USE IN A LITHOGRAPHIC PRODUCTION PROCESS
审中-公开
基本信息:
- 专利标题： METHOD FOR THERMO-MECHANICAL CONTROL OF A HEAT SENSITIVE ELEMENT AND DEVICE FOR USE IN A LITHOGRAPHIC PRODUCTION PROCESS
- 申请号：PCT/EP2021/064753 申请日：2021-06-02
- 公开(公告)号：WO2022002519A1 公开(公告)日：2022-01-06
- 发明人： DOLK, Victor, Sebastiaan , VAN BERKEL, Koos , SCHNEIDERS, Mauritius, Gerardus, Elisabeth
- 申请人： ASML NETHERLANDS B.V.
- 申请人地址： P.O. Box 324
- 专利权人： ASML NETHERLANDS B.V.
- 当前专利权人： ASML NETHERLANDS B.V.
- 当前专利权人地址： P.O. Box 324
- 代理机构： ASML NETHERLANDS B.V.
- 优先权： EP20183453.8 2020-07-01
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; G03F7/705 ; G03F7/7085 ; G03F7/70891
摘要：
The invention provides a method for thermo-mechanical control of a heat sensitive element (Ml) subject to a heat load, comprising: -providing a non-linear thermo-mechanical model of the heat sensitive element describing a dynamical relationship between characteristics of the heat load and deformation of the heat sensitive element; -calculating a control signal on the basis of an optimization calculation of the non-linear model, -providing an actuation signal to a heater (HE), wherein the actuation signal is at least partially based on the control signal, -heating the heat sensitive element by the heater on the basis of the actuation signal.