基本信息:
- 专利标题： DIAGNOSTIC DISC WITH A HIGH VACUUM AND TEMPERATURE TOLERANT POWER SOURCE
- 申请号：PCT/US2021/035261 申请日：2021-06-01
- 公开(公告)号：WO2021247586A1 公开(公告)日：2021-12-09
- 发明人： CRIMINALE, Phillip A. , GUO, Zhiqiang , KRAUS, Philip A. , MYLES, Andrew , PEREZ-GUZMAN, Martin
- 申请人： APPLIED MATERIALS, INC.
- 申请人地址： 3050 Bowers Avenue
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 当前专利权人地址： 3050 Bowers Avenue
- 代理机构： KIMES, Benjamin A. et al.
- 优先权： US16/890,013 2020-06-02
- 主分类号： H01L21/66
- IPC分类号： H01L21/66 ; H01L21/67 ; H01J37/32 ; G05B19/418 ; H02J7/00 ; H02J50/80 ; H02J50/10 ; H01L21/67253 ; H05K1/181 ; H05K2201/10015 ; H05K2201/10151 ; H05K5/03 ; H05K5/069 ; H05K7/1427
摘要：
A diagnostic disc includes a disc-shaped body having raised walls that encircle the interior of the disc-shaped body and at least one protrusion extending outwardly from the disc-shaped body. The raised walls of the disc-shaped body define a cavity of the disc-shaped body. A non-contact sensor is attached to each of the at least one protrusion. A a printed circuit board (PCB) is positioned within the cavity formed on the disc-shaped body. A vacuum and high temperature tolerant power source is disposed on the PCB along with a wireless charger and circuitry that is coupled to each non-contact sensor and includes at least a wireless communication circuit and a memory. A cover is positioned over the cavity of the disc-shaped body and shields at least a portion of the PCB, circuitry, power source, and wireless charger within the cavity from an external environment.
IPC结构图谱:
| H | 电学 |
| --H01 | 基本电气元件 |
| ----H01L | 半导体器件；其他类目未包含的电固体器件 |
| ------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
| --------H01L21/66 | .在制造或处理过程中的测试或测量 |