基本信息:
- 专利标题： CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD
- 申请号：PCT/EP2021/053324 申请日：2021-02-11
- 公开(公告)号：WO2021165134A1 公开(公告)日：2021-08-26
- 发明人： WIELAND, Marco, Jan-Jaco
- 申请人： ASML NETHERLANDS B.V.
- 申请人地址： P.O. Box 324
- 专利权人： ASML NETHERLANDS B.V.
- 当前专利权人： ASML NETHERLANDS B.V.
- 当前专利权人地址： P.O. Box 324
- 代理机构： ASML NETHERLANDS B.V.
- 优先权： EP20158732.6 2020-02-21
- 主分类号： H01J37/12
- IPC分类号： H01J37/12 ; H01J37/153 ; H01J37/28
摘要：
Charged particle assessment tools and inspection methods are disclosed. In one arrangement, a condenser lens array divides a beam of charged particles into a plurality of sub-beams. Each subbeam is focused to a respective intermediate focus. Objective lenses downstream from the intermediate foci project sub-beams from the condenser lens array onto a sample. A path of each subbeam is substantially a straight line from each condenser lens to a corresponding objective lens.