基本信息:
- 专利标题: MESSVORRICHTUNG ZUR INTERFEROMETRISCHEN FORMVERMESSUNG
- 专利标题(英):MEASURING APPARATUS FOR INTERFEROMETRIC SHAPE MEASUREMENT
- 申请号:PCT/EP2021/050975 申请日:2021-01-19
- 公开(公告)号:WO2021148363A1 公开(公告)日:2021-07-29
- 发明人: HETZLER, Jochen , SCHULTE, Stefan , DREHER, Matthias
- 申请人: CARL ZEISS SMT GMBH
- 申请人地址: Rudolf-Eber-Straße 2
- 专利权人: CARL ZEISS SMT GMBH
- 当前专利权人: CARL ZEISS SMT GMBH
- 当前专利权人地址: Rudolf-Eber-Straße 2
- 代理机构: SUMMERER, Christian et al.
- 优先权: DE10 2020 200 628.8 2020-01-21
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G01M11/00 ; G01B11/24 ; G01B11/2441 ; G01B2290/30 ; G01B9/02039 ; G01B9/02057 ; G01B9/02072 ; G01M11/005
A measuring apparatus (10) for interferometric shape measurement of a surface (12) of a test object (14) comprises a test optical unit (26; 226-1, 226-2) configured to generate a test wave (28) for irradiating the surface of the test object from measurement radiation (18), a reference element (32; 232) having an optically effective surface (33; 233) for interaction with a reference wave (30, 30r), which is likewise generated from the measurement radiation (18) and which serves for generating an interferogram by superimposition with the test wave after the interaction thereof with the surface of the test object, and a holding device (48; 148) for holding the reference element, said holding device being configured to move the reference element relative to the reference wave in at least two rigid body degrees of freedom in such a way that a marginal point of the optically effective surface of the reference element is displaced by at least 0.1% of a diameter of the optically effective surface, wherein the at least two rigid body degrees of freedom comprise a translational degree of freedom directed transversely with respect to a direction of propagation of the reference wave radiated from the reference element, and a rotational degree of freedom, the axis of rotation of which is oriented substantially parallel to the direction of propagation of the reference wave radiated from the reference element.
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01B | 长度、厚度或类似线性尺寸的计量;角度的计量;面积的计量;不规则的表面或轮廓的计量 |
------G01B9/00 | 组中所列的及以采用光学测量方法为其特征的仪器 |
--------G01B9/02 | .干涉仪 |