发明申请
WO2020263667A1 NANO-TEXTURED ATTENUATOR FOR USE WITH LASER BEAM PROFILING AND LASER BEAM CHARACTERIZATION SYSTEMS AND METHOD OF USE
审中-公开
基本信息:
- 专利标题： NANO-TEXTURED ATTENUATOR FOR USE WITH LASER BEAM PROFILING AND LASER BEAM CHARACTERIZATION SYSTEMS AND METHOD OF USE
- 申请号：PCT/US2020/038389 申请日：2020-06-18
- 公开(公告)号：WO2020263667A1 公开(公告)日：2020-12-30
- 发明人： KIRKHAM, Kevin , FERREE, Kenneth
- 申请人： MKS INSTRUMENTS
- 申请人地址： 2 Tech Drive, Suite 201
- 专利权人： MKS INSTRUMENTS
- 当前专利权人： MKS INSTRUMENTS
- 当前专利权人地址： 2 Tech Drive, Suite 201
- 代理机构： SWIENTON, Brian
- 优先权： US62/865,160 2019-06-22
- 主分类号： G01J1/42
- IPC分类号： G01J1/42 ; G01J1/04 ; G01J1/0414 ; G01J1/0418 ; G01J1/4257 ; G01J2001/0285 ; G02B26/023 ; G02B27/108 ; G02B27/145 ; G02B27/281
摘要：
The present application discloses a nano-textured attenuator which includes a body defining in the aperture, a measurement aperture, at least one beam dump aperture, at least one coupling fixture may be formed on or positioned on the body, a first nano-textured beamsplitter is positioned within the body and configured to transmit 85% to 99.9999% of an input signal therethrough while reflecting 0.0001% to form at least one partially attenuated signal, at least a second nano-textured beamsplitter is positioned within the body and is configured to transmit 85% to 99.9999% of an input signal therethrough while reflecting 0.0001% to form at least one attenuated measurement signal, and at least one camera is communication with the measurement aperture be configured to measure at least one optical characteristic of the attenuated measurement signal.
IPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01J | 红外光、可见光、紫外光的强度、速度、光谱成分，偏振、相位或脉冲特性的测量；比色法；辐射高温测定法 |
| ------G01J1/00 | 光度测定法，例如照相的曝光表 |
| --------G01J1/42 | .采用电辐射检测器 |