基本信息:
- 专利标题： ROTARY REACTOR FOR UNIFORM PARTICLE COATING WITH THIN FILMS
- 申请号：PCT/US2019/036721 申请日：2019-06-12
- 公开(公告)号：WO2019241351A1 公开(公告)日：2019-12-19
- 发明人： NEIKIRK, Colin C. , NARWANKAR, Pravin K. , GANGAKHEDKAR, Kaushal , SIVARAMAKRISHNAN, Visweswaren , FRANKEL, Jonathan , ISHIKAWA, David Masayuki , TRUONG, Quoc , YUDOVSKY, Joseph
- 申请人： APPLIED MATERIALS, INC. , NEIKIRK, Colin C. , NARWANKAR, Pravin K. , GANGAKHEDKAR, Kaushal , SIVARAMAKRISHNAN, Visweswaren , FRANKEL, Jonathan , ISHIKAWA, David Masayuki , TRUONG, Quoc , YUDOVSKY, Joseph
- 申请人地址： 3050 Bowers Avenue Santa Clara, California 95054 US
- 专利权人： APPLIED MATERIALS, INC.,NEIKIRK, Colin C.,NARWANKAR, Pravin K.,GANGAKHEDKAR, Kaushal,SIVARAMAKRISHNAN, Visweswaren,FRANKEL, Jonathan,ISHIKAWA, David Masayuki,TRUONG, Quoc,YUDOVSKY, Joseph
- 当前专利权人： APPLIED MATERIALS, INC.,NEIKIRK, Colin C.,NARWANKAR, Pravin K.,GANGAKHEDKAR, Kaushal,SIVARAMAKRISHNAN, Visweswaren,FRANKEL, Jonathan,ISHIKAWA, David Masayuki,TRUONG, Quoc,YUDOVSKY, Joseph
- 当前专利权人地址： 3050 Bowers Avenue Santa Clara, California 95054 US
- 代理机构： DAVIS, Erica MK et al.
- 优先权： US62/683,763 20180612
- 主分类号： C23C16/455
- IPC分类号： C23C16/455 ; C23C16/44 ; C23C16/448 ; C23C16/40 ; A61K9/50
摘要：
A reactor for coating particles includes one or more motors, a rotary vacuum chamber configured to hold particles to be coated, wherein the rotary vacuum chamber is coupled to the motors to rotate the rotary vacuum chamber in a first direction about an axial axis of a cylindrical portion of the rotary vacuum chamber, a vacuum port to exhaust gas from the rotary vacuum chamber, a paddle assembly including a rotatable drive shaft extending through the rotary vacuum chamber and coupled to the one or more motors and at least one paddle extending radially from the drive shaft, such that rotation of the drive shaft by the motors orbits the paddle about the drive shaft in a second direction, and a chemical delivery system including a gas outlet on the paddle configured inject process gas into the particles.