发明申请
WO2019185391A1 METHOD OF ASSEMBLING A SEMICONDUCTOR POWER MODULE COMPONENT, SEMICONDUCTOR POWER MODULE WITH SUCH A MODULE COMPONENT HAVING COMPONENT PARTS SOLDERED TOGETHER AND COMPONENT PARTS SINTERED TOGETHER, AS WELL AS MANUFACTURING SYSTEM THEREFOR
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基本信息:
- 专利标题: METHOD OF ASSEMBLING A SEMICONDUCTOR POWER MODULE COMPONENT, SEMICONDUCTOR POWER MODULE WITH SUCH A MODULE COMPONENT HAVING COMPONENT PARTS SOLDERED TOGETHER AND COMPONENT PARTS SINTERED TOGETHER, AS WELL AS MANUFACTURING SYSTEM THEREFOR
- 申请号:PCT/EP2019/056730 申请日:2019-03-18
- 公开(公告)号:WO2019185391A1 公开(公告)日:2019-10-03
- 发明人: OSTERWALD, Frank , ULRICH, Holger
- 申请人: DANFOSS SILICON POWER GMBH
- 申请人地址: Husumer Strasse 251 24941 Flensburg DE
- 专利权人: DANFOSS SILICON POWER GMBH
- 当前专利权人: DANFOSS SILICON POWER GMBH
- 当前专利权人地址: Husumer Strasse 251 24941 Flensburg DE
- 代理机构: STEVENS, Brian et al.
- 优先权: DE10 20180329
- 主分类号: H01L23/373
- IPC分类号: H01L23/373 ; H01L23/367 ; H01L21/603 ; H01L21/48 ; H01L21/67 ; H01L23/31 ; H01L23/049 ; H01L23/053 ; H01L23/24 ; H01L23/46
摘要:
A method of assembling a semiconductor power module component (30) and a manufacturing system comprising such a semiconductor power module component and a pressing apparatus (20) for manufacturing a semiconductor power module component are described. The semiconductor power module component (30) comprises at least a first element (1) (e.g. a semiconductor chip), a second element (2) (e.g. a substrate, such a DCB substrate) and a third element (3) (e.g. a base plate) arranged in a stack (10). The first element (1) and the second element (2) are joined by sintering in a sintering area (4) and the second element (2) and the third element (3) are joined by soldering in a soldering area (6). The sintering and the soldering are simultaneously executed, wherein the soldering area (6) is heated to a temperature of soldering and the sintering area (4) is heated to a temperature of sintering, the temperature of soldering and the temperature of sintering being harmonized to each other. Pressure is being applied to the stack (10), comprising the at least one soldering area (6) and the at least one sintering area (4) with stabilizing means (7) such as bumps on a surface of the second element (2) or third element (3), solid spacer means incorporated in a solder perform (8) or a wire mesh incorporated in a solder preform (8) being arranged in the soldering area (6). Additional component parts (14, 15) may be sintered onto the first element and/or the second element simultaneously with the sintering and the soldering of the stack (10). The pressure may be applied by a soft cushion-like element (23) surrounding component parts (1, 2, 3, 14, 15) of the module (30).
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L23/00 | 半导体或其他固态器件的零部件 |
--------H01L23/34 | .冷却装置;加热装置;通风装置或温度补偿装置 |
----------H01L23/36 | ..为便于冷却或加热对材料或造型的选择,例如散热器 |
------------H01L23/373 | ...为便于冷却的器件材料选择 |