发明申请
WO2019063206A1 METHOD OF DETERMINING CONTROL PARAMETERS OF A DEVICE MANUFACTURING PROCESS
审中-公开
基本信息:
- 专利标题： METHOD OF DETERMINING CONTROL PARAMETERS OF A DEVICE MANUFACTURING PROCESS
- 申请号：PCT/EP2018/072605 申请日：2018-08-22
- 公开(公告)号：WO2019063206A1 公开(公告)日：2019-04-04
- 发明人： TEL, Wim, Tjibbo , MASLOW, Mark, John , VAN INGEN SCHENAU, Koenraad , WARNAAR, Patrick , SLACHTER, Abraham , ANUNCIADO, Roy , VAN GORP, Simon, Hendrik, Celine , STAALS, Frank , JOCHEMSEN, Marinus
- 申请人： ASML NETHERLANDS B.V.
- 申请人地址： P.O. Box 324 5500 AH Veldhoven NL
- 专利权人： ASML NETHERLANDS B.V.
- 当前专利权人： ASML NETHERLANDS B.V.
- 当前专利权人地址： P.O. Box 324 5500 AH Veldhoven NL
- 代理机构： PETERS, John
- 优先权： EP17193430.0 20170927; EP17200255.2 20171107; EP18155070.8 20180205
- 主分类号： G03F7/20
- IPC分类号： G03F7/20
摘要：
Disclosed herein is a method for determining one or more control parameters of a manufacturing process comprising a lithographic process and one or more further processes, the method comprising: obtaining an image of at least part of a substrate, wherein the image comprises at least one feature manufactured on the substrate by the manufacturing process; calculating one or more image-related metrics in dependence on a contour determined from the image, wherein one of the image -related metrics is an edge placement error, EPE, of the at least one feature; and determining one or more control parameters of the lithographic process and/or said one or more further processes in dependence on the edge placement error, wherein at least one control parameter is determined so as to minimize the edge placement error of the at least one feature.