发明申请
WO2018160411A1 HIGH FREQUENCY OPTICAL MODULATOR WITH LATERALLY DISPLACED CONDUCTION PLANE RELATIVE TO MODULATING ELECTRODES
审中-公开
基本信息:
- 专利标题： HIGH FREQUENCY OPTICAL MODULATOR WITH LATERALLY DISPLACED CONDUCTION PLANE RELATIVE TO MODULATING ELECTRODES
- 申请号：PCT/US2018/019007 申请日：2018-02-21
- 公开(公告)号：WO2018160411A1 公开(公告)日：2018-09-07
- 发明人： CHEN, Chengkun , POIRIER, Maxime , NARAYAN, Raghuram , GOKHALE, Milind , BOUDREAU, Marcel Gerard
- 申请人： NEOPHOTONICS CORPORATION
- 申请人地址： 2911 Zanker Road San Jose, CA 95134 US
- 专利权人： NEOPHOTONICS CORPORATION
- 当前专利权人： NEOPHOTONICS CORPORATION
- 当前专利权人地址： 2911 Zanker Road San Jose, CA 95134 US
- 代理机构： DARDI, Peter S. et al.
- 优先权： US15/462,099 20170317; US62/466,694 20170303
- 主分类号： G02F1/225
- IPC分类号： G02F1/225 ; G02F1/21
摘要：
Optical modulators are described having a Mach-Zehnder interferometer and a pair of RF electrodes interfaced with the Mach-Zehnder interferometer in which the Mach-Zehnder interferometer comprises optical waveguides formed from semiconductor material. The optical modulator also comprises a ground plane spaced away in a distinct plane from transmission line electrodes formed from the association of the pair of RF electrodes interfaced with the Mach-Zehnder interferometer. The ground plane can be associated with a submount in which an optical chip comprising the Mach-Zehnder interferometer and the pair of RF electrodes is mounted on the submount with the two semiconductor optical waveguides are oriented toward the submount. Methods for forming the modulators are described.