发明申请
WO2018069922A2 SYSTEMS AND METHODS FOR ACOUSTIC EMISSION MONITORING OF SEMICONDUCTOR DEVICES
审中-公开
基本信息:
- 专利标题： SYSTEMS AND METHODS FOR ACOUSTIC EMISSION MONITORING OF SEMICONDUCTOR DEVICES
- 专利标题（中）：用于半导体器件的声发射监测的系统和方法
- 申请号：PCT/IL2017/051123 申请日：2017-10-03
- 公开(公告)号：WO2018069922A2 公开(公告)日：2018-04-19
- 发明人： RUDYK, Eduard , NEGRI, Ori , SHAUL, Gal , YOSKOVITZ, Saar
- 申请人： AUGURY SYSTEMS LTD.
- 申请人地址： 39 Haatzmaut Street 3303320 Haifa IL
- 专利权人： AUGURY SYSTEMS LTD.
- 当前专利权人： AUGURY SYSTEMS LTD.
- 当前专利权人地址： 39 Haatzmaut Street 3303320 Haifa IL
- 代理机构： COLB, Sanford, T. et al.
- 优先权： US62/406,138 20161010
- 主分类号： G01R9/02
- IPC分类号： G01R9/02
摘要：
A system for monitoring and identifying states of a semiconductor device, the system including at least one acoustic sensor for sensing acoustic emission emitted by at least one semiconductor device operating at a voltage of less than or equal to 220 V, the at least one acoustic sensor outputting at least one acoustic emission signal and a signal processing unit for receiving the at least one acoustic emission signal from the at least one acoustic sensor and for analyzing the at least one acoustic emission signal, the signal processing unit providing an output based on the analyzing, the output being indicative at least of whether the at least one semiconductor device is in an abnormal operating state with respect to a normal operating state of the semiconductor device.
摘要（中）：
一种用于监视和识别半导体器件的状态的系统，所述系统包括至少一个声传感器，用于感测由至少一个半导体器件发射的声发射，所述半导体器件在小于或等于220 V，所述至少一个声学传感器输出至少一个声发射信号，以及信号处理单元，用于接收来自所述至少一个声学传感器的所述至少一个声发射信号并用于分析所述至少一个声发射信号，所述信号处理 单元，基于所述分析提供输出，所述输出至少指示所述至少一个半导体器件相对于所述半导体器件的正常操作状态是否处于异常操作状态。
公开/授权文献:
IPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01R | 测量电变量；测量磁变量（通过转换成电变量对任何种类的物理变量进行测量参见G01类名下的 |
| ------G01R9/00 | 采用机械谐振的仪表 |
| --------G01R9/02 | .振动式检流计，例如用于测量电流 |