发明申请
WO2018063343A1 SYSTEMS, METHODS, AND APPARATUSES FOR IMPLEMENTING BI-LAYER SEMICONDUCTING OXIDES IN SOURCE AND DRAIN FOR LOW ACCESS AND CONTACT RESISTANCE OF THIN FILM TRANSISTORS
审中-公开
基本信息:
- 专利标题: SYSTEMS, METHODS, AND APPARATUSES FOR IMPLEMENTING BI-LAYER SEMICONDUCTING OXIDES IN SOURCE AND DRAIN FOR LOW ACCESS AND CONTACT RESISTANCE OF THIN FILM TRANSISTORS
- 专利标题(中):用于实现薄膜晶体管的低接入和接触电阻的双层半导体氧化物在源极和漏极中的系统,方法和设备
- 申请号:PCT/US2016/054841 申请日:2016-09-30
- 公开(公告)号:WO2018063343A1 公开(公告)日:2018-04-05
- 发明人: DEWEY, Gilbert , LE, Van H. , RIOS, Rafael , SHIVARAMAN, Shriram , KAVALIEROS, Jack T. , RADOSAVLJEVIC, Marko
- 申请人: INTEL CORPORATION
- 申请人地址: 2200 Mission College Boulevard Santa Clara, California 95054 US
- 专利权人: INTEL CORPORATION
- 当前专利权人: INTEL CORPORATION
- 当前专利权人地址: 2200 Mission College Boulevard Santa Clara, California 95054 US
- 代理机构: BRASK, Justin, K. et al.
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L21/768
摘要:
In accordance with disclosed embodiments, there are provided systems, methods, and apparatuses for implementing bi-layer semiconducting oxides in a source/drain for low access and contact resistance of thin film transistors. For instance, there is disclosed in accordance with one embodiment a semiconductor device having therein a substrate; a bi-layer oxides layer formed from a first oxide material and a second oxide material, the first oxide material comprising a semiconducting oxide material and having different material properties from the second oxide material comprising a high mobility oxide material; a channel layer formed atop the substrate, the channel layer formed from the semiconducting oxide material of the bi-layer oxides layer; a high mobility oxide layer formed atop the channel layer, the high conductivity oxide layer formed from the high mobility oxide material of the bi-layer oxides layer; metallic contacts formed atop the high mobility oxide layer; a gate and a gate oxide material formed atop the high mobility oxide layer, the gate oxide material being in direct contact with the high mobility oxide layer; and spacers separating the metallic contacts from the gate and gate oxide material. Other related embodiments are disclosed.
摘要(中):
根据所公开的实施例,提供了用于在用于薄膜晶体管的低访问和接触电阻的源极/漏极中实现双层半导体氧化物的系统,方法和设备。 例如,根据一个实施例公开了一种其中具有衬底的半导体器件; 由第一氧化物材料和第二氧化物材料形成的双层氧化物层,所述第一氧化物材料包含半导体氧化物材料且具有与包含高迁移率氧化物材料的所述第二氧化物材料不同的材料特性; 在衬底上形成的沟道层,沟道层由双层氧化物层的半导体氧化物材料形成; 在所述沟道层顶上形成的高迁移率氧化物层,所述高导电率氧化物层由所述双层氧化物层的高迁移率氧化物材料形成; 形成在高迁移率氧化物层顶上的金属触点; 在所述高迁移率氧化物层顶上形成的栅极氧化物材料和栅极氧化物材料,所述栅极氧化物材料与所述高迁移率氧化物层直接接触; 以及将金属触点与栅极和栅极氧化物材料分开的间隔件。 披露了其他相关的实施例。 p>
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L29/00 | 专门适用于整流、放大、振荡或切换,并具有至少一个电位跃变势垒或表面势垒的半导体器件;具有至少一个电位跃变势垒或表面势垒,例如PN结耗尽层或载流子集结层的电容器或电阻器;半导体本体或其电极的零部件 |
--------H01L29/02 | .按其半导体本体的特征区分的 |
----------H01L29/68 | ..只能通过对一个不通有待整流、放大或切换的电流的电极供给电流或施加电位方可进行控制的 |
------------H01L29/70 | ...双极器件 |
--------------H01L29/762 | ....电荷转移器件 |
----------------H01L29/78 | .....由绝缘栅产生场效应的 |