发明申请
WO2016192534A1 OPTICAL DEVICE FOR DETECTING AN INTERNAL FLAW OF A TRANSPARENT SUBSTRATE AND METHOD FOR THE SAME
审中-公开
基本信息:
- 专利标题: OPTICAL DEVICE FOR DETECTING AN INTERNAL FLAW OF A TRANSPARENT SUBSTRATE AND METHOD FOR THE SAME
- 专利标题(中):用于检测透明基板的内部光的光学装置及其相关方法
- 申请号:PCT/CN2016/082440 申请日:2016-05-18
- 公开(公告)号:WO2016192534A1 公开(公告)日:2016-12-08
- 发明人: ZHENG, Yuan , ZHU, Jia
- 申请人: SAINT-GOBAIN GLASS FRANCE , ZHENG, Yuan , ZHU, Jia
- 申请人地址: 18 Avenue d'Alsace F-92400 Courbevoie FR
- 专利权人: SAINT-GOBAIN GLASS FRANCE,ZHENG, Yuan,ZHU, Jia
- 当前专利权人: SAINT-GOBAIN GLASS FRANCE,ZHENG, Yuan,ZHU, Jia
- 当前专利权人地址: 18 Avenue d'Alsace F-92400 Courbevoie FR
- 代理机构: UNITALEN ATTORNEYS AT LAW
- 优先权: CN201510301023.0 20150603
- 主分类号: G01N21/896
- IPC分类号: G01N21/896
摘要:
Provided is an optical device (100) and a method for detecting a flaw of a transparent substrate (130). The optical device (100) for detecting an internal flaw of a transparent substrate (130) includes: a first detection unit (110) configured to detect the substrate (130) at a predetermined low resolution, where the first detection unit (110) includes a first photosensitive element (111) and a first lens (112) between the substrate (130) and the first photosensitive element (111), and the first photosensitive element (111) and the first lens (112) are disposed such that an object plane is inclined relative to the substrate (130); a second detection unit (120) configured to detect the substrate (130) at a predetermined high resolution, where the second detection unit (120) includes a second photosensitive element (121) and a second lens (122) between the substrate (130) and the second photosensitive element (121); and a processor (150) configured to determine a portion of the flaws detected by the first detection unit (110) as flaws to be detected by the second detection unit (120), and to determine a type of the flaw based on an image for the substrate (130) imaged by the second detection unit (120).
摘要(中):
提供了一种光学装置(100)和用于检测透明基板(130)的缺陷的方法。 用于检测透明基板(130)的内部缺陷的光学装置(100)包括:第一检测单元(110),被配置为以预定的低分辨率检测基板(130),其中第一检测单元(110)包括 第一感光元件(111)和位于基板(130)和第一感光元件(111)之间的第一透镜(112),第一感光元件(111)和第一透镜(112) 平面相对于衬底(130)倾斜; 第二检测单元(120),被配置为以预定的高分辨率检测所述基板(130),其中所述第二检测单元(120)包括所述基板(130)之间的第二感光元件(121)和第二透镜(122) 和第二感光元件(121); 以及处理器(150),被配置为将由所述第一检测单元(110)检测到的所述缺陷的一部分确定为由所述第二检测单元(120)检测的缺陷,并且基于所述第一检测单元(110)的图像来确定所述缺陷的类型, 由第二检测单元(120)成像的基板(130)。
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01N | 借助于测定材料的化学或物理性质来测试或分析材料 |
------G01N21/00 | 利用光学手段,即利用红外光、可见光或紫外光来测试或分析材料 |
--------G01N21/01 | .便于进行光学测试的装置或仪器 |
----------G01N21/88 | ..测试瑕疵、缺陷或污点的存在 |
------------G01N21/89 | ...在移动的材料中,例如,纸张、织物中 |
--------------G01N21/892 | ....特征在于待测的瑕疵、缺陷或物品的特点 |
----------------G01N21/896 | .....透明材料之中或表面的光学缺陷,例如形变、表面瑕疵 |