基本信息:
- 专利标题： REGENERATIVE COOLING METHOD AND APPARATUS
- 专利标题（中）：再生冷却方法和装置
- 申请号：PCT/US2016/015942 申请日：2016-02-01
- 公开(公告)号：WO2016126600A1 公开(公告)日：2016-08-11
- 发明人： TAYLOR, Roscoe W. , HOERMANN, Alexander F.
- 申请人： MONOLITH MATERIALS, INC.
- 申请人地址： 1700 Seaport Blvd., Suite 110 Redwood City, California 94063 US
- 专利权人： MONOLITH MATERIALS, INC.
- 当前专利权人： MONOLITH MATERIALS, INC.
- 当前专利权人地址： 1700 Seaport Blvd., Suite 110 Redwood City, California 94063 US
- 代理机构： MUELLER, Robert W. et al.
- 优先权： US62/111,341 20150203
- 主分类号： C23C16/513
- IPC分类号： C23C16/513 ; F01D25/24 ; F28F27/02 ; H01T19/00
摘要：
A method of cooling a liner in a plasma chamber. A recycle gas is contacted with or passed through the liner to cool the liner and pre-heat the recycle gas. The pre-heated gas is then recycled through the plasma chamber to become part of the plasma forming process. The method further comprises the liner is graphite, the recycle gas passes through at least one cooling channel present in the liner, at least one of the cooling channels are covered with at least one removable liner/channel cover, carbon deposits are formed from the presence of hydrocarbons in the recycle gas, at least one channel is formed in a spiral cooling channel pattern, at least one channel is formed in a substantially straight cooling channel pattern, and a plenum to aid in the production of an even distribution of cooling gas in the channels.
摘要（中）：
一种在等离子体室中冷却衬套的方法。 循环气体与衬套接触或通过衬套以冷却衬套并预热再循环气体。 然后将预热的气体通过等离子体室再循环以成为等离子体形成过程的一部分。 该方法还包括衬垫是石墨，再循环气体通过存在于衬套中的至少一个冷却通道，至少一个冷却通道被至少一个可移除的衬套/通道盖覆盖，从存在形成碳沉积物 的循环气体中的烃，至少一个通道形成为螺旋形冷却通道图案，至少一个通道形成为基本上直的冷却通道图案，以及一个增压室，以帮助制造均匀分布的冷却气体 渠道。