发明申请
WO2015126784A1 PHOTO-ACOUSTIC DEVICE AND METHOD FOR NON-CONTACT MEASUREMENT OF THIN LAYERS
审中-公开
基本信息:
- 专利标题: PHOTO-ACOUSTIC DEVICE AND METHOD FOR NON-CONTACT MEASUREMENT OF THIN LAYERS
- 专利标题(中):用于薄层非接触式测量的光声装置和方法
- 申请号:PCT/US2015/016033 申请日:2015-02-16
- 公开(公告)号:WO2015126784A1 公开(公告)日:2015-08-27
- 发明人: PRINZHORN, Heinrich , ERDMAN, Stefan , WUTTKE, Thomas , BAUER, Andreas , ABEL, Bernd , CHARVAT, Ales
- 申请人: NOVELIS INC.
- 申请人地址: 3560 Lenox Road, Suite 2000 Atlanta, Georgia 30326 US
- 专利权人: NOVELIS INC.
- 当前专利权人: NOVELIS INC.
- 当前专利权人地址: 3560 Lenox Road, Suite 2000 Atlanta, Georgia 30326 US
- 代理机构: MCDONALD, John K. et al.
- 优先权: US61/941,404 20140218
- 主分类号: G01B17/02
- IPC分类号: G01B17/02 ; G01N29/04
摘要:
A measuring device for non-mechanical-contact measurement of a layer, the measuring device including a light source operative to generate a pulse adapted to interact with the layer so as to generate a thermal wave in a gas medium present adjacent the layer. The thermal wave causes an acoustic signal to be generated. The measuring device further includes a detector adapted to detect a first signal responsive to the acoustic signal, the detector not being in mechanical contact with the layer. The first signal is representative of the measured layer.
摘要(中):
一种用于层的非机械接触测量的测量装置,所述测量装置包括光源,所述光源用于产生适于与所述层相互作用的脉冲,以在邻近所述层的气体介质中产生热波。 热波导致产生声信号。 测量装置还包括检测器,适于检测响应于声信号的第一信号,检测器不与该层机械接触。 第一个信号是测量层的代表。
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01B | 长度、厚度或类似线性尺寸的计量;角度的计量;面积的计量;不规则的表面或轮廓的计量 |
------G01B17/00 | 以采用次声波、声波、超声波振动为特征的计量设备 |
--------G01B17/02 | .用于计量厚度 |