基本信息:
- 专利标题: A PHOTOACOUSTIC METROLOGY TOOL
- 专利标题(中):一个光电计量工具
- 申请号:PCT/EP2013/064201 申请日:2013-07-04
- 公开(公告)号:WO2014006167A1 公开(公告)日:2014-01-09
- 发明人: HORAN, Kenneth , CUNNINGHAM, Michael , FRYAR, James , ALLEN, David , McNally, Patrick , MAMUM, Kabir
- 申请人: SONEX METROLOGY LTD.
- 申请人地址: Swords Enterprise Park Feltrim Road, Swords Dublin IE
- 专利权人: SONEX METROLOGY LTD.
- 当前专利权人: SONEX METROLOGY LTD.
- 当前专利权人地址: Swords Enterprise Park Feltrim Road, Swords Dublin IE
- 代理机构: MOORE, Barry et al.
- 优先权: GB1212016.8 20120706
- 主分类号: G01N29/24
- IPC分类号: G01N29/24 ; G01N21/17 ; G01N21/88 ; G01N21/95
摘要:
A photoacoustic metrology tool comprises at least one light source for optically exciting a unit under test (UUT). A volume is provided for capturing acoustic energy emanating from the UUT as result of optical excitation thereof. An acoustic pick-up is provided for receiving the captured acoustic energy and generating a corresponding electrical signal. A control means is co-operable with the light source and the acoustic pickup for controlling photoacoustic analysis of the UUT.
摘要(中):
光声计量工具包括用于光学激发待测单元(UUT)的至少一个光源。 提供了用于捕获从UUT发出的声能的体积,作为其光激发的结果。 提供声拾取器用于接收所捕获的声能并产生相应的电信号。 控制装置可与光源和声拾取器配合,用于控制UUT的光声分析。