发明申请
WO2013026537A3 DEVICE AND METHOD FOR MEASURING THE BEAM DEFLECTION BY MEANS OF FREQUENCY ANALYSIS
审中-公开
基本信息:
- 专利标题: DEVICE AND METHOD FOR MEASURING THE BEAM DEFLECTION BY MEANS OF FREQUENCY ANALYSIS
- 专利标题(中):设备和方法测量梁的挠度进行频率分析
- 申请号:PCT/EP2012003414 申请日:2012-08-09
- 公开(公告)号:WO2013026537A3 公开(公告)日:2013-04-11
- 发明人: ZWECK JOSEF
- 申请人: UNIV REGENSBURG , ZWECK JOSEF
- 专利权人: UNIV REGENSBURG,ZWECK JOSEF
- 当前专利权人: UNIV REGENSBURG,ZWECK JOSEF
- 优先权: DE102011052924 2011-08-23
- 主分类号: H01J37/244
- IPC分类号: H01J37/244 ; G02B21/00 ; H01J37/26
摘要:
The invention relates to a device for determining a deflection of the test beam (12) caused by interaction with a sample (10), comprising an oscillator unit (28) that periodically deflects the test beam and a detector unit (24) relative to one another. The detector unit is designed in such a way that the sensitive surface of the detector covered by the test beam and thus the corresponding measurement signal changes in a non-linear manner as a function of the deflection in the event of relative deflection of the test beam and of the detector unit. An evaluation of the detector signal on the basis of a Fourier spectral analysis and the theory of second harmonics generation then enables the definition of the smallest beam shifts caused by interaction with the sample having high dynamics. In an alternative design, instead of the beam deflection the effect of the sample to be measured is periodically modulated.
摘要(中):
一种用于确定与样品(10)相互作用的结果设备引起探测束(12)的偏转包括振荡器单元(28),其周期性地偏转探测光束和一个检测器单元(24)相对于彼此。 所述检测器单元被布置成使得由所述检测器单元并且在探测光束的相对偏转相应的测量信号和所述检测器单元的探测光束敏感表面覆盖的区域不作为偏转的函数线性变化。 傅立叶频谱分析和二次谐波生成的理论的基础上检测器信号的评估然后使得能够通过与具有高动力学采样光束位移相互作用诱导的最小的判定。 在一个替代实施例中,代替光束偏转是样品的测量的效果进行周期性调制。
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01J | 放电管或放电灯 |
------H01J37/00 | 有把物质或材料引入使受到放电作用的结构的电子管,如为了对其检验或加工的 |
--------H01J37/02 | .零部件 |
----------H01J37/244 | ..检测器;所采用的组件或电路 |