发明申请
WO2012177876A3 ENCAPSULATION OF ELECTRODES IN SOLID MEDIA FOR USE IN CONJUNCTION WITH FLUID HIGH VOLTAGE ISOLATION
审中-公开
基本信息:
- 专利标题： ENCAPSULATION OF ELECTRODES IN SOLID MEDIA FOR USE IN CONJUNCTION WITH FLUID HIGH VOLTAGE ISOLATION
- 专利标题（中）：固体介质中电极的附着与流体高压隔离相结合
- 申请号：PCT/US2012043548 申请日：2012-06-21
- 公开(公告)号：WO2012177876A3 公开(公告)日：2013-02-28
- 发明人： KELLOGG SEAN , GRAUPERA ANTHONY , PARKER N WILLIAM , UTLAUT MARK W , WELLS ANDREW B , MCGINN JAMES B
- 申请人： FEI CO , KELLOGG SEAN , GRAUPERA ANTHONY , PARKER N WILLIAM , UTLAUT MARK W , WELLS ANDREW B , MCGINN JAMES B
- 专利权人： FEI CO,KELLOGG SEAN,GRAUPERA ANTHONY,PARKER N WILLIAM,UTLAUT MARK W,WELLS ANDREW B,MCGINN JAMES B
- 当前专利权人： FEI CO,KELLOGG SEAN,GRAUPERA ANTHONY,PARKER N WILLIAM,UTLAUT MARK W,WELLS ANDREW B,MCGINN JAMES B
- 优先权： US201113165556 2011-06-21; US201213437599 2012-04-02
- 主分类号： H05H1/00
- IPC分类号： H05H1/00
摘要：
An inductively-coupled plasma source for a focused charged particle beam system includes a conductive shield that provides improved electrical isolation and reduced capacitive RF coupling and a dielectric fluid that insulates and cools the plasma chamber. The conductive shield may be enclosed in a solid dielectric media. The dielectric fluid may be circulated by a pump or not circulated by a pump. A heat tube can be used to cool the dielectric fluid.
摘要（中）：
用于聚焦带电粒子束系统的电感耦合等离子体源包括提供改进的电隔离和减小的电容RF耦合的导电屏蔽以及绝缘和冷却等离子体室的介电流体。 导电屏蔽件可以封闭在固体介电介质中。 电介质流体可以由泵循环或不被泵循环。 可以使用热管来冷却介电流体。