基本信息:
- 专利标题： COMPOSITE TARGET
- 专利标题（中）：复合材料目标
- 申请号：PCT/US2012037071 申请日：2012-05-09
- 公开(公告)号：WO2012154817A8 公开(公告)日：2013-11-07
- 发明人： ROZAK GARY ALAN , GAYDOS MARK E
- 申请人： STARCK H C INC , ROZAK GARY ALAN , GAYDOS MARK E
- 专利权人： STARCK H C INC,ROZAK GARY ALAN,GAYDOS MARK E
- 当前专利权人： STARCK H C INC,ROZAK GARY ALAN,GAYDOS MARK E
- 优先权： US201161484450 2011-05-10; US201213467323 2012-05-09
- 主分类号： C23C14/34
- IPC分类号： C23C14/34
摘要：
A sputtering target that includes at least two consolidated blocks, each block including an alloy including molybdenum in an amount greater than about 30 percent by weight and at least one additional alloying ingredient; and a joint between the at least two consolidated blocks, the joint being free of any microstructure due to an added bonding agent (e.g., powder, foil or otherwise), and being essentially free of any visible joint line that is greater than about 200 mum width (e.g., less than about 50 pm width). A process for making the target includes hot isostatically pressing, below a temperature of 1080 °C, consolidated perform blocks that may be surface prepared (e.g.,, roughened to a predetermined roughness value) prior to pressing.
摘要（中）：
包括至少两个固结块的溅射靶，每个块包括含量大于约30重量％的钼和至少一种另外的合金成分的合金; 以及所述至少两个固结块之间的接头，所述接头由于添加的粘合剂（例如，粉末，箔或其它）而没有任何微观结构，并且基本上没有任何大于约200μm的可见接合线 宽度（例如，小于约50μm的宽度）。 制造目标的方法包括在压制之前在1080℃以下的热等静压，可以表面制备（例如，粗糙化至预定粗糙度值）的固结的执行块。