A barrier film including a substrate, a base polymer layer applied on a major surface of the substrate, an oxide layer applied on the base polymer layer, and a protective polymer layer applied on the oxide layer. The protective polymer layer is formed as the reaction product of a first (meth)acryloyl compound and a (meth)acryl-silane compound derived from a Michael reaction between a second (meth)acryloyl compound and an aminosilane. The first and second (meth)acryloyl compounds may be the same. In some embodiments, a multiplicity of alternating layers of the oxide layer and the protective polymer layer may be used. An oxide layer can be applied over the top protective polymer layer. The barrier films provide, in some embodiments, enhanced resistance to moisture and improved peel strength adhesion of the protective polymer layer(s) to the underlying layers. A process of making, and methods of using the barrier film are also described.