基本信息:
- 专利标题： METHOD FOR RECONSTRUCTING A SEMICONDUCTOR TEMPLATE
- 专利标题（中）：重构半导体模板的方法
- 申请号：PCT/US2011/068270 申请日：2011-12-31
- 公开(公告)号：WO2012099701A1 公开(公告)日：2012-07-26
- 发明人： KRAMER, Karl-Josef , MOSLEHI, Mehrdad, M. , WANG, David, Xuan-Qi , KAVARI, Rahim , RICOLCOL, Rafael , ASHJAEE, Jay
- 申请人： SOLEXEL, INC. , KRAMER, Karl-Josef , MOSLEHI, Mehrdad, M. , WANG, David, Xuan-Qi , KAVARI, Rahim , RICOLCOL, Rafael , ASHJAEE, Jay
- 申请人地址： 1530 Mccarthy Blvd. Milpitas, CA 95035 US
- 专利权人： SOLEXEL, INC.,KRAMER, Karl-Josef,MOSLEHI, Mehrdad, M.,WANG, David, Xuan-Qi,KAVARI, Rahim,RICOLCOL, Rafael,ASHJAEE, Jay
- 当前专利权人： SOLEXEL, INC.,KRAMER, Karl-Josef,MOSLEHI, Mehrdad, M.,WANG, David, Xuan-Qi,KAVARI, Rahim,RICOLCOL, Rafael,ASHJAEE, Jay
- 当前专利权人地址： 1530 Mccarthy Blvd. Milpitas, CA 95035 US
- 代理机构： WOOD, John
- 优先权： US61/429,033 20101231; US13/209,390 20110813
- 主分类号： H01L31/042
- IPC分类号： H01L31/042 ; H01L31/0216 ; H01L31/18
摘要：
The disclosed subject matter pertains to deposition of thin film or thin foil materials in general, but more specifically to deposition of epitaxial monocrystalline or quasi-monocrystalline silicon film (epi film) for use in manufacturing of high efficiency solar cells. In operation, methods are disclosed which extend the reusable life and to reduce the amortized cost of a substrate or template used in the manufacturing process of silicon solar cells. Further, methods are disclosed which provide for the conversion of a low quality starting surface into an improved quality starting surface of a silicon wafer.
摘要（中）：
所公开的主题一般涉及薄膜或薄箔材料的沉积，更具体地涉及用于制造高效率太阳能电池的外延单晶或准单晶硅膜（epi膜）的沉积。 在操作中，公开了延长可再利用寿命并降低在硅太阳能电池的制造过程中使用的基板或模板的摊销成本的方法。 此外，公开了提供将低质量起始表面转化为硅晶片的改进质量起始表面的方法。