基本信息:
- 专利标题: POROUS AND NON-POROUS NANOSTRUCTURES
- 申请号:PCT/US2011/027746 申请日:2011-03-09
- 公开(公告)号:WO2011156028A3 公开(公告)日:2011-12-15
- 发明人: FERRARI, Mauro , LIU, Xuewu , CHIAPPINI, Ciro , FAKHOURY, Jean, Raymond
- 申请人: BOARD OF REGENTS OF THE UNIVERSITY OF TEXAS SYSTEM , FERRARI, Mauro , LIU, Xuewu , CHIAPPINI, Ciro , FAKHOURY, Jean, Raymond
- 申请人地址: 201 West 7th Street Austin, TX 78701 US
- 专利权人: BOARD OF REGENTS OF THE UNIVERSITY OF TEXAS SYSTEM,FERRARI, Mauro,LIU, Xuewu,CHIAPPINI, Ciro,FAKHOURY, Jean, Raymond
- 当前专利权人: BOARD OF REGENTS OF THE UNIVERSITY OF TEXAS SYSTEM,FERRARI, Mauro,LIU, Xuewu,CHIAPPINI, Ciro,FAKHOURY, Jean, Raymond
- 当前专利权人地址: 201 West 7th Street Austin, TX 78701 US
- 代理机构: AMINI, Farhang
- 优先权: US61/282,627 20100309
- 主分类号: C01B31/02
- IPC分类号: C01B31/02 ; B82B1/00 ; H01L21/70 ; H01L21/762
摘要:
Disclosed are a variety of porous and non-porous wire-like structures of microscopic and nanoscopic scale. For instance, disclosed are structures that comprise a porous object that comprises: (i) a first region; and (ii) a second region adjacent to the first region along an axis of the object, where the first region has at least one porous property different from that of the second region. Also disclosed are structures that include: (i) a high resistivity silicon; and (ii) a cross-section that is substantially perpendicular to an axis of the object. Also disclosed are methods of making and using such structures. For instance, the present invention provides methods of making a porous object by: (i) obtaining an etchable substrate; (ii) forming on a surface of the substrate a patterned porosification assisting metal layer that has at least one opening; and (iii) subsequently exposing the substrate to a first etching solution and a second etching solution to form respectively a first region and a second region of a porous object.