发明申请
WO2011008478A3 SYSTEM AND METHOD FOR PERFORMING PHOTOTHERMAL MEASUREMENTS AND RELAXATION COMPENSATION
审中-公开
基本信息:
- 专利标题： SYSTEM AND METHOD FOR PERFORMING PHOTOTHERMAL MEASUREMENTS AND RELAXATION COMPENSATION
- 申请号：PCT/US2010/040063 申请日：2010-06-25
- 公开(公告)号：WO2011008478A3 公开(公告)日：2011-01-20
- 发明人： ROTTER, Lawrence D. , WANG, David Y. , SHAUGHNESSY, Derrick , SENKO, Mark
- 申请人： KLA-TENCOR CORPORATION , ROTTER, Lawrence D. , WANG, David Y. , SHAUGHNESSY, Derrick , SENKO, Mark
- 申请人地址： KLA-Tencor Corporation Legal Department One Technology Drive Milpitas, California 95035 US
- 专利权人： KLA-TENCOR CORPORATION,ROTTER, Lawrence D.,WANG, David Y.,SHAUGHNESSY, Derrick,SENKO, Mark
- 当前专利权人： KLA-TENCOR CORPORATION,ROTTER, Lawrence D.,WANG, David Y.,SHAUGHNESSY, Derrick,SENKO, Mark
- 当前专利权人地址： KLA-Tencor Corporation Legal Department One Technology Drive Milpitas, California 95035 US
- 代理机构： MCANDREWS, Kevin
- 优先权： US12/494,734 20090630
- 主分类号： G01N25/72
- IPC分类号： G01N25/72 ; G01N21/63 ; H01L21/66
摘要：
A device and methods for performing a photothermal measurement and relaxation compensation of a sample are disclosed. The device may include a probe beam source, a pump beam source, a sample, and a detector array. A method may include adjusting an intensity modulated pump beam power, adjusting a probe beam power to increase a response measurement location temperature and increase a modulated optical reflectance signal, directing the intensity modulated pump beam and the probe beam along a measurement path to a response measurement location on a sample for periodically exciting a region on the sample, detecting a reflected portion of the probe beam, and calculating an implantation dose.
IPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01N | 借助于测定材料的化学或物理性质来测试或分析材料 |
| ------G01N25/00 | 应用热方法测试或分析材料 |
| --------G01N25/72 | .测试缺陷的存在 |