基本信息:
- 专利标题: METHOD OF PRODUCING A MICROSTRUCTURED PRODUCT
- 专利标题(中):生产微结构产品的方法
- 申请号:PCT/SE2008051538 申请日:2008-12-19
- 公开(公告)号:WO2009085004A8 公开(公告)日:2010-11-18
- 发明人: LUNDVALL AXEL , NIKOLAJEFF FREDRIK , GUSTAVSSON FREDRIK , EKLUND ROBERT
- 申请人: ROLLING OPTICS AB , LUNDVALL AXEL , NIKOLAJEFF FREDRIK , GUSTAVSSON FREDRIK , EKLUND ROBERT
- 专利权人: ROLLING OPTICS AB,LUNDVALL AXEL,NIKOLAJEFF FREDRIK,GUSTAVSSON FREDRIK,EKLUND ROBERT
- 当前专利权人: ROLLING OPTICS AB,LUNDVALL AXEL,NIKOLAJEFF FREDRIK,GUSTAVSSON FREDRIK,EKLUND ROBERT
- 优先权: SE0702914 2007-12-28; SE0800766 2008-04-04
- 主分类号: G03F9/00
- IPC分类号: G03F9/00 ; B29C59/04 ; G03H1/04 ; H05K3/00 ; H05K13/02
摘要:
The present invention provides a method of producing a two-sided microstructured product and a registration structure that can be used for the method. The method comprises the steps of: (800) providing primary product features (80) at a first surface of a substrate sheet (50); (810) providing secondary product features (90) at an opposed surface; (820) registering the mutual alignment of the primary and secondary product features (80, 90) to estimate alignment parameters; and (830) aligning the provision of primary and secondary product features (80, 90).The registration structure comprises a registration-array of focusing elements (20) at a first surface and a registration-array of reference objects (30) at an opposed surface aligned with primary and secondary product features (80,90) that provides a holographic representation (10) of the reference objects(30) in order to estimate the alignment of product features (80,90).
摘要(中):
本发明提供一种可以用于该方法的双面微结构产品和配准结构的制造方法。 该方法包括以下步骤:(800)在基片(50)的第一表面处提供初级产品特征(80); (810)在相对的表面处提供次要产品特征(90); (820)记录所述主要和次要产品特征(80,90)的相互对准以估计对准参数; 对准结构包括在第一表面处的聚焦元件(20)的注册阵列和参考对象(30)的注册阵列,其中,所述注册结构包括:第一和第二产品特征(80,90) 相对表面与主要和次要产品特征(80,90)对准,其提供参考对象(30)的全息表示(10),以便估计产品特征(80,90)的对齐。