发明申请
WO2008026859A1 FIN FIELD EFFECT TRANSISTOR HAIVING LOW LEAKAGE CURRENT AND METHOD OF MANUFACTURING THE FINFET
审中-公开
基本信息:
- 专利标题: FIN FIELD EFFECT TRANSISTOR HAIVING LOW LEAKAGE CURRENT AND METHOD OF MANUFACTURING THE FINFET
- 专利标题(中):具有低泄漏电流的FIN场效应晶体管和制造FINFET的方法
- 申请号:PCT/KR2007/004111 申请日:2007-08-27
- 公开(公告)号:WO2008026859A1 公开(公告)日:2008-03-06
- 发明人: LEE, Jong Ho
- 申请人: KYUNGPOOK NATIONAL UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION , LEE, Jong Ho
- 申请人地址: Kyungpook National University Sangyeok3-Dong, Buk-Gu Daegu 702-701 KR
- 专利权人: KYUNGPOOK NATIONAL UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION,LEE, Jong Ho
- 当前专利权人: KYUNGPOOK NATIONAL UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION,LEE, Jong Ho
- 当前专利权人地址: Kyungpook National University Sangyeok3-Dong, Buk-Gu Daegu 702-701 KR
- 代理机构: LEE, Ji Yeon
- 优先权: KR10-2006-0084370 20060901
- 主分类号: H01L29/78
- IPC分类号: H01L29/78
摘要:
Provided is a fin field effect transistor (FinFET) having low leakage current and a method of manufacturing the same. The FinFET includes: a bulk silicon substrate! a fence-shaped body formed by patterning the substrate; an insulating layer formed on a surface of the substrate to a first height of the fence-shaped body! a gate insulating layer formed at side walls and an upper surface of the fence-shaped body at which the insulating layer is not formed; a gate electrode formed on the gate insulating layer; source/drain formed at regions of the fence-shaped body where the gate electrode is not formed. The gate electrode includes first and second gate electrodes which are in contact with each other and have different work functions. Particularly, the second gate electrode having a low work function is disposed to be close to the drain. As a result, the FinFET according to the present invention increases a threshold voltage by using a material having the high work function for the gate electrode and lowers the work function of the gate electrode overlapping with the drain, so that gate induced drain leakage (GIDL) can be reduced.
摘要(中):
提供了具有低漏电流的鳍式场效应晶体管(FinFET)及其制造方法。 FinFET包括:散装硅衬底! 通过图案化基板形成的栅栏体; 绝缘层,形成在所述基板的表面上至所述栅栏体的第一高度! 在侧壁形成的栅极绝缘层和不形成绝缘层的栅栏状体的上表面; 形成在所述栅极绝缘层上的栅电极; 源极/漏极形成在栅极体的不形成栅电极的区域处。 栅电极包括彼此接触并具有不同功函数的第一和第二栅电极。 特别地,具有低功函数的第二栅电极设置成靠近漏极。 结果,根据本发明的FinFET通过使用具有用于栅电极的高功函数的材料来增加阈值电压,并降低与漏极重叠的栅电极的功函数,从而导致漏极漏极(GIDL )可以减少。
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L29/00 | 专门适用于整流、放大、振荡或切换,并具有至少一个电位跃变势垒或表面势垒的半导体器件;具有至少一个电位跃变势垒或表面势垒,例如PN结耗尽层或载流子集结层的电容器或电阻器;半导体本体或其电极的零部件 |
--------H01L29/02 | .按其半导体本体的特征区分的 |
----------H01L29/68 | ..只能通过对一个不通有待整流、放大或切换的电流的电极供给电流或施加电位方可进行控制的 |
------------H01L29/70 | ...双极器件 |
--------------H01L29/762 | ....电荷转移器件 |
----------------H01L29/78 | .....由绝缘栅产生场效应的 |