基本信息:
- 专利标题： ADAPTIVE CONTROL METHOD FOR RAPID THERMAL PROCESSING OF A SUBSTRATE
- 专利标题（中）：基板快速热处理的自适应控制方法
- 申请号：PCT/US2007/063482 申请日：2007-03-07
- 公开(公告)号：WO2007114987A2 公开(公告)日：2007-10-11
- 发明人： RANISH, Joseph Michael , DIXIT, Tarpan , JENNINGS, Dean , RAMACHANDRAN, Balasubramanian , HUNTER, Aaron , ADERHOLD, Wolfgang , ADAMS, Bruce , CHANG, Wen Teh
- 申请人： APPLIED MATERIALS, INC. , RANISH, Joseph Michael , DIXIT, Tarpan , JENNINGS, Dean , RAMACHANDRAN, Balasubramanian , HUNTER, Aaron , ADERHOLD, Wolfgang , ADAMS, Bruce , CHANG, Wen Teh
- 申请人地址： 3050 Bowers Avenue Santa Clara, California 95054 US
- 专利权人： APPLIED MATERIALS, INC.,RANISH, Joseph Michael,DIXIT, Tarpan,JENNINGS, Dean,RAMACHANDRAN, Balasubramanian,HUNTER, Aaron,ADERHOLD, Wolfgang,ADAMS, Bruce,CHANG, Wen Teh
- 当前专利权人： APPLIED MATERIALS, INC.,RANISH, Joseph Michael,DIXIT, Tarpan,JENNINGS, Dean,RAMACHANDRAN, Balasubramanian,HUNTER, Aaron,ADERHOLD, Wolfgang,ADAMS, Bruce,CHANG, Wen Teh
- 当前专利权人地址： 3050 Bowers Avenue Santa Clara, California 95054 US
- 代理机构： PATTERSON, B Todd et al.
- 优先权： US11/393,423 20060330
- 主分类号： H04B7/185
- IPC分类号： H04B7/185
摘要：
The present invention generally relates to methods for the rapid thermal processing (RTP) of a substrate. Embodiments of the invention include controlling a thermal process using either a real-time adaptive control algorithm or by using a control algorithm that is selected from a suite of fixed control algorithms designed for a variety of substrate types. Selection of the control algorithm is based on optical properties of the substrate measured during the thermal process. In one embodiment, a combination of control algorithms are used, wherein the majority of lamp groupings are controlled with a fixed control algorithm and a substantially smaller number of lamp zones are controlled by an adaptive control algorithm.
摘要（中）：
本发明一般涉及用于衬底的快速热处理（RTP）的方法。 本发明的实施例包括使用实时自适应控制算法或通过使用从针对各种基板类型设计的一套固定控制算法中选择的控制算法来控制热处理。 控制算法的选择基于在热处理期间测量的衬底的光学性质。 在一个实施例中，使用控制算法的组合，其中大多数灯分组由固定控制算法控制，并且通过自适应控制算法来控制基本上较少数量的灯区。