发明申请
WO2007112300A2 SYSTEMS AND METHODS FOR MEASURING ONE OR MORE CHARACTERISTICS OF PATTERNED FEATURES ON A SPECIMEN
审中-公开
基本信息:
- 专利标题： SYSTEMS AND METHODS FOR MEASURING ONE OR MORE CHARACTERISTICS OF PATTERNED FEATURES ON A SPECIMEN
- 专利标题（中）：用于测量样本中图案特征的一个或多个特征的系统和方法
- 申请号：PCT/US2007/064769 申请日：2007-03-23
- 公开(公告)号：WO2007112300A2 公开(公告)日：2007-10-04
- 发明人： WACK, Dan , WANG, Haiming , GROSS, Kenneth P.
- 申请人： KLA-TENCOR TECHNOLOGIES CORPORATION , WACK, Dan , WANG, Haiming , GROSS, Kenneth P.
- 申请人地址： One Technology Drive Milpitas, CA 95035 US
- 专利权人： KLA-TENCOR TECHNOLOGIES CORPORATION,WACK, Dan,WANG, Haiming,GROSS, Kenneth P.
- 当前专利权人： KLA-TENCOR TECHNOLOGIES CORPORATION,WACK, Dan,WANG, Haiming,GROSS, Kenneth P.
- 当前专利权人地址： One Technology Drive Milpitas, CA 95035 US
- 代理机构： MEWHERTER, Ann Marie
- 优先权： US11/277,856 20060329
- 主分类号： G01B11/14
- IPC分类号： G01B11/14 ; G01N21/55
摘要：
Systems and methods for measuring one or more characteristics of patterned features on a specimen are provided. One system includes an optical subsystem configured to acquire measurements of light scattered from the patterned features on the specimen at multiple angles of incidence, multiple azimuthal angles, and multiple wavelengths simultaneously. The system also includes a processor configured to determine the one or more characteristics of the patterned features from the measurements. One method includes acquiring measurements of light scattered from the patterned features on the specimen at multiple angles of incidence, multiple azimuthal angles, and multiple wavelengths simultaneously. The method also includes determining the one or more characteristics of the patterned features from the measurements.
摘要（中）：
提供了用于测量样本上的图案特征的一个或多个特征的系统和方法。 一个系统包括光学子系统，被配置为从多个入射角，多个方位角和多个波长同时获取从样本上的图案化特征散射的光的测量。 该系统还包括配置成从测量中确定图案化特征的一个或多个特性的处理器。 一种方法包括以多个入射角，多个方位角和多个波长同时从样本上的图案化特征散射的光的测量。 该方法还包括从测量中确定图案化特征的一个或多个特性。
IPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01B | 长度、厚度或类似线性尺寸的计量；角度的计量；面积的计量；不规则的表面或轮廓的计量 |
| ------G01B11/00 | 以采用光学方法为特征的计量设备 |
| --------G01B11/14 | .用于计量相隔的物体或孔的间距或间隙 |