基本信息:
- 专利标题： A MEMS MASS SPECTROMETER
- 申请号：PCT/US2006/028695 申请日：2006-07-24
- 公开(公告)号：WO2007055756A3 公开(公告)日：2007-05-18
- 发明人： FREIDHOFF, Carl, B.
- 申请人： NORTHROP GRUMMAN CORPORATION , FREIDHOFF, Carl, B.
- 申请人地址： 1840 Century Park East Los Angeles, CA 90067-2199 US
- 专利权人： NORTHROP GRUMMAN CORPORATION,FREIDHOFF, Carl, B.
- 当前专利权人： NORTHROP GRUMMAN CORPORATION,FREIDHOFF, Carl, B.
- 当前专利权人地址： 1840 Century Park East Los Angeles, CA 90067-2199 US
- 代理机构： GATES, William, L.
- 优先权： US11/260,106 20051028
- 主分类号： H01J49/28
- IPC分类号： H01J49/28
摘要：
A MEMS mass spectrometer having metal walls connected between a lid and base, with the walls defining a plurality of interior chambers including sample gas input chambers, an ionizer chamber, a plurality of ion optics chambers and a ion separation chamber. A detector array at the end of the ion separation chamber includes a plurality of V-shaped detector elements positioned along two parallel lines and arranged to intercept all of the ionized beams produced in the mass spectrometer.