基本信息:
- 专利标题: METHOD AND DEVICE FOR MEASURING ULTRAHIGH VACUUM
- 专利标题(中):用于测量超声波真空的方法和装置
- 申请号:PCT/SI2005/000003 申请日:2005-01-26
- 公开(公告)号:WO2005080932A1 公开(公告)日:2005-09-01
- 发明人: VESEL, Alenka , MOZETIC, Miran
- 申请人: INSTITUT "JOSEF STEFAN" , VESEL, Alenka , MOZETIC, Miran
- 申请人地址: Jamova 39, 1000 Ljubljana SI
- 专利权人: INSTITUT "JOSEF STEFAN",VESEL, Alenka,MOZETIC, Miran
- 当前专利权人: INSTITUT "JOSEF STEFAN",VESEL, Alenka,MOZETIC, Miran
- 当前专利权人地址: Jamova 39, 1000 Ljubljana SI
- 代理机构: ITEM D.O.O.
- 优先权: SIP-200400060 20040223
- 主分类号: G01L21/34
- IPC分类号: G01L21/34
摘要:
The invention relates to a method and a device for measuring ultrahigh vacuum and, more particularly, to a method for measuring ultrahigh vacuum with an ultrahighvacuum cold cathode pressure gauge, and to an ultrahighvacuum cold cathode pressure gauge. The pressure gauge according to the invention operates at a voltage that varies with pressure in such a way that the ion current is maintained at its maximum value at all times. The method for measuring ultrahigh vacuum by means of an ultrahighvacuum'cold cathode pressure gauge is characterized in that the voltage-controlled source (3) preliminarily scans the entire voltage range, preferably between 1 kV and 12 kV, in a short time, and subsequently sets the source to the voltage, at which the current was at its maximum value, or that, alternatively, the voltage-controlled source (3), based on the calibration of the gauge, sets the voltage, for a given pressure, to the value that has been previously stored as optimal. The device for measuring ultrahigh vacuum, is characterized in that the anode (1) of the pressure gauge cell is connected to a voltage-controlled source (3) providing a varying voltage.
摘要(中):
本发明涉及一种用于测量超高真空度的方法和装置,更具体地说,涉及一种用超高真空冷阴极压力计测量超高真空度的方法和超高真空冷阴极压力计。 根据本发明的压力表以在压力下变化的电压工作,使得离子电流始终保持在其最大值。 通过超高真空阴极压力表测量超高真空的方法的特征在于,压控源(3)在短时间内预先扫描整个电压范围,优选在1kV和12kV之间,随后 将电源设置为电流处于其最大值的电压,或者基于量规的校准,电压源(3)将给定压力的电压设置为 以前存储为最佳值。 用于测量超高真空的装置的特征在于,压力计单元的阳极(1)连接到提供变化电压的电压源(3)。
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01L | 测量力、应力、转矩、功、机械功率、机械效率或流体压力 |
------G01L21/00 | 真空计 |
--------G01L21/10 | .通过测量介质热导率的变化而测出介质压力的 |
----------G01L21/34 | ..应用具有冷阴极的放电管 |